2008
DOI: 10.1299/jcst.2.568
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Crystal Morphology Analysis of Piezoelectric Ceramics Using Electron BackScatter Diffraction Method and Its Application to Multiscale Finite Element Analysis

Abstract: Microstructural crystal morphology, which affects strongly on macroscopic electromechanical behaviors of polycrystalline piezoelectric ceramics, was analyzed using electron backscatter diffraction method. We coated piezoelectric ceramics with amorphous osmium to defend against electrification caused by electron beam, and measured crystal orientations of 140×120 µm 2 over region at 0.32 µm scanning interval. Then the obtained crystal orientations were applied to a multiscale finite element analysis to evaluate … Show more

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Cited by 5 publications
(6 citation statements)
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“…for PZT [13] Figure 8 shows the full components of macroscopic homogenized material properties obtained through the multiscale simulation using the SEM・EBSD-measured realistic microstructure in figure 7. The material properties of BaTiO 3 single crystal [14] were utilized for each element on the assumption that each grain is poled fully and it consists of a single domain.…”
Section: Multiscale Finite Element Simulationmentioning
confidence: 99%
See 1 more Smart Citation
“…for PZT [13] Figure 8 shows the full components of macroscopic homogenized material properties obtained through the multiscale simulation using the SEM・EBSD-measured realistic microstructure in figure 7. The material properties of BaTiO 3 single crystal [14] were utilized for each element on the assumption that each grain is poled fully and it consists of a single domain.…”
Section: Multiscale Finite Element Simulationmentioning
confidence: 99%
“…In case of our previous study on BaTiO 3 [12], crystal orientation maps with high resolution couldn't be obtained because of the electrification of specimen. Additionally, in our previous investigation on PZT [13], the computations were carried out by using uncertain material properties to microstructural grains because single crystals are nonexistent and their material properties were unknown. In this paper, we retry to analyze the microstructure of BaTiO 3 by SEM・EBSD measurement.…”
Section: Introductionmentioning
confidence: 99%
“…We obtained distribution of crystal orientation in a 3-D parallelepiped box region of a BaTiO 3 ceramic (Murata Manufacturing Co. Ltd.) by using the EBSD (Oxford Instruments plc, Link ISIS C.7272) implemented in the SEM (JEOL Datum Ltd., JSM-5410) [5]. The specimen was a circular disk of 15mm diameter and 1mm thickness, and it was electrically poled along the thickness direction.…”
Section: Construction Of Sem-ebsd Measured 3-d Micro Finite Elemmentioning
confidence: 99%
“…In our previous studies, we have analyzed the microstructure of BaTiO 3 [29,30] and PZT [31] by mean of EBSD. We focused on polycrystalline piezoelectric ceramics because they have most diffi cult microstructure for numerical modeling.…”
Section: Introductionmentioning
confidence: 99%