Highly (100)-and (110)-oriented LaNiO 3 (LNO) thin films were successfully prepared on a Si (100) substrate using the chemical solution deposition method. It was somewhat surprising to find that the orientation of LNO films depended on the heating rates of the temperature range of 2001-4001C. The samples with heating rates beyond 101C/s showed the preferential (100) orientation, while those with heating rates below 6.671C/s showed the preferential (110) orientation. The orientation mechanism is controlled by the thermodynamics of nucleation and crystal growth. LNO films with controlled orientation having low resistivities of 2 mX . cm are a good basis for integrating ferroelectric applications.
I. IntroductionG ENERALLY, ferroelectric thin films are grown on Pt/Ti/SiO 2 / Si substrates for various microelectronic applications. However, ferroelectric thin films on this kind of substrates have serious fatigue problems. Besides, Pt electrodes often result in the formation of hillocks, which can electrically short the capacitors. 1 To solve these problems, conductive perovskite oxides, such as SrRuO 3 , La 0.5 Sr 0.5 CoO 3 , YBa 2 Cu 3 O 7Àx , La 0.7 Sr 0.3 MnO 3 , and LaNiO 3 (LNO), have recently been studied as the most promising alternatives. 2,3 Among these oxides, LNO has attracted considerable attention because they effectively improve fatigue and decrease the leakage current of ferroelectric thin films. It was also confirmed that the ferroelectric film prepared on the LNO had excellent electrical properties. 4 Moreover, LNO is simple in composition and stoichiometric in oxygen content and its resistivity is not sensitive to an oxygen atmosphere. Therefore, an LNO film can be used as an excellent bottom electrode. 5 Considering its integration on silicon and its effect on the properties of the subsequent functional oxides deposited on it, the preparation of an LNO film on Si having a good conductivity and controlled orientation is desired. An LNO film acts not only as a bottom electrode but also as a template to control the orientation of the oxides on it. Therefore, investigation on the orientation control of an LNO film is an intriguing subject of significant importance. 6 The preparation of LNO films on the Si substrate has been carried out by a variety of methods. Usually, RF magnetron sputtering methods lead to (100)-oriented LNO films, 7 and PLD methods often result in (110)-oriented LNO films, 8 while the chemical solution deposition (CSD) methods can yield both (100)-and (110)-oriented LNO films by changing the concentration or solvent of the precursor solution. 9,10 In this letter, we successfully controlled the orientation growth of LNO films by changing the annealing parameters of a simple CSD method, and the orientation mechanism is discussed.H. Suzuki-contributing editor