Crystallization Disruption via Atomic Layer Deposition Substitutional Dopant Scheduling: High-Mobility Amorphous Indium Zinc Tin Oxide
Mark Muir,
Jacob E. Kupferberg,
Jessica C. Jones
et al.
Abstract:Transparent conducting oxides (TCOs) are widely used in thin film transistors (TFTs), displays, window coatings, and solar energy conversion applications, with varying demands on mobility, conductivity, transparency, and roughness. We investigate supercycle atomic layer deposition (ALD) dosing strategies that achieve high electron mobility while inhibiting the crystallization of In 2 O 3 -based TCOs and producing smoother films. ALD In 2 O 3 layers (A) of varying thickness are separated by a single cycle of AL… Show more
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