2013
DOI: 10.1016/j.apsusc.2013.07.082
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Crystallization of amorphous Ge2Sb2Te5 films induced by an ultraviolet laser

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Cited by 22 publications
(10 citation statements)
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“…However, when the laser energy further increases to 28000 mJ/cm 2 , the diffraction peaks become weaker gradually. This phenomenon is similar to other reports15 and can be explained that the thin film is excessively ablated after the laser irradiation and then transformed back to an amorphous state due to high laser energy density.…”
Section: Resultssupporting
confidence: 91%
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“…However, when the laser energy further increases to 28000 mJ/cm 2 , the diffraction peaks become weaker gradually. This phenomenon is similar to other reports15 and can be explained that the thin film is excessively ablated after the laser irradiation and then transformed back to an amorphous state due to high laser energy density.…”
Section: Resultssupporting
confidence: 91%
“…The peak ‘C’ at 137 cm −1 may be attributed to the segregation of Te crystalline phase for over-irradiation14. The peak ‘D’ at 160 cm −1 can be ascribed to the A 1g (2) vibration of crystalline Sb 2 Te 3 15.…”
Section: Resultsmentioning
confidence: 98%
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“…It is worth to mention that while the latter observation is typical for the process of GST225 crystallization [14,15], the first one seems unusual from the viewpoint of generally accepted increase in Ge 2 Sb 2 Te 5 density during crystallization [16][17][18]. In comparison with the crystalline area, smoother surface and non-crystalline structure of the central dark spot suggest melting and rapid cooling of material in that area under the laser treatment.…”
Section: Discussionmentioning
confidence: 86%
“…It is known that the thermal and electrical fields are the two main routes to modify structure and properties of Ge–Sb–Te materials. Amorphous Ge 2 Sb 2 Te 5 can be crystallized into rocksalt‐type Ge 2 Sb 2 Te 5 when the temperature increases (Kooi et al ., ) or electron/laser irradiation (Kooi et al ., ; Zhang et al ., ; Zhou et al ., ) is conducted. However, such structural transition is usually accompanied without modification of chemical composition.…”
mentioning
confidence: 99%