“…Although titanium alkoxy/β-diketonates are well documented in the literature, [16,17] the only analogous Zr compound thus far reported is Zr(O t Bu) 2 (acac) 2 , used in the sol-gel deposition of ZrO 2 . [18] This approach aims to combine the advantages of high ambient stability, associated with coordinatively saturated zirconium β-diketonates, with the lower thermal stability and increased volatility of Zr(OR) 4 compounds, and in this communication we report the growth of ZrO 2 films at reduced temperature by MOCVD using the novel precursors Zr(OR) 2 (thd) 2 (R = i Pr, t Bu).…”