Nanoparticle Ru:TiO 2 films were prepared by a sol-gel process using RuCl 3 , Ti(OBu) 4 as raw material, the as-prepared film samples were also characterized by TG-DTA, SEM, and SPS testing techniques. TiO 2 nanoparticles experienced two processes of phase transition, i.e. amorphous to anatase and anatase to rutile at the calcining temperature range from 400 to 800 ºC. TiO 2 nanoparticles calcined at 700 ºC had similar composition, structure, morphology and particle size with the internationally commercial P-25 TiO 2 particles. Thus, the conclusion that 700 ºC might be the most appropriate calcining temperature during the preparation process of nanoparticle Ru:TiO 2 /ITO film photocatalysts could be made by considering the main factors such as the properties of TiO 2 nanoparticles, the adhesion of nanoparticle Ru:TiO 2 film to glass substrate, and the surface characteristics and morphology of nanoparticle Ru:TiO 2 /ITO film for the practice view. The SPS demonstrates that the effects of the quantum size on optical property were greater than that of the Coulomb and surface polarization. In addition, during the experimental process of the photocatalytic degradation phenol, the photocatalytic activity of nanoparticle Ru:TiO 2 /ITO film with five layers calcined at 700 ºC is the highest.