Crystallographic texture and morphology of obliquely deposited Co-Cr magnetic thin films on flexible polymeric substrates

Hagemeyer, Alfred; Richter, Hans; Hibst, H.; Maier, Vasilica; Marosi, L.

doi:10.1016/0040-6090(93)90515-q

Cited by 12 publications

(6 citation statements)

References 13 publications

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“…Assessment of micro-pores is less straightforward, as these must be distributed within the interior of the nanocolumns. Nevertheless, the pore size distribution and surface area of Co-Cu IBAD Change of crystalline structure from hcp to fcc by ion beam irradiation [199] Co-Cr Evaporation and MS c-axis oriented along the nanocolumn axis [257] Cd-Te Evaporation Change from cubic to hexagonal structure depending on zenithal angle [139] AlN MS Sudden development of a preferential (0 0 0 2) orientation along the nanocolumn axis with the concentration of N 2 in the plasma gas [171] MS Variation of c-axis (0 0 0 2) orientation with geometry and other parameters [165] CrN MS Preferential formation of (0 0 1) films on single crystal MgO (0 0 1) [ different oxides has been determined by Flaherty et al [231] using a similar adsorption system consisting of a quartz crystal monitor and different vapors condensed at room temperature. This confirmed that the maximum internal surface area per unit volume occurs when a ¼ 75 .…”

Section: Porosity and Adsorption Propertiesmentioning

confidence: 99%

“…For example, metal wire grid polarizers are already mass produced by the OAD deposition of antireflection FeSi and SiO 2 layers on previously deposited aluminum columnar arrays [87,114,115] (see Section 2.5). Magnetic recording/video tapes are another example where OAD techniques have been successfully employed in large scale production [604][605][606][607].…”

Section: Concluding Remarks: Up-scaling and Industrial Implementationmentioning

confidence: 99%

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Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

618

436

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a b s t r a c tThe oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is analyzed along with other methods operating at oblique angles, including, among others, magnetron sputtering and pulsed laser or ion beam-assisted deposition techniques. To account for the existing differences between deposition in vacuum or in the presence of a plasma, mechanistic simulations are critically revised, discussing well-established paradigms such as the tangent or cosine rules, and proposing new models that explain the growth of tilted porous nanostructures. In the second part, we present an extensive description of applications wherein oblique-angle-deposited thin films are of relevance. From there, we proceed by considering the requirements of a large number of functional devices in which these films are currently being utilized (e.g., solar cells, Li batteries, electrochromic glasses, biomaterials, sensors, etc.), and subsequently describe how and why these nanostructured materials meet with these needs.

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Section: Porosity and Adsorption Propertiesmentioning

confidence: 99%

Section: Concluding Remarks: Up-scaling and Industrial Implementationmentioning

confidence: 99%

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

618

436

View full text Add to dashboard Cite

show abstract

“…The material within the column can be either a single grain or polycrystalline. Columnar microstructures typically lead to film with anisotropic electrical, 4 optical, 5 and magnetic properties, 6 and nonrandom crystallographic texture. 7 At low growth temperatures ͑i.e., TϽ0.5T m , where T m is the melting temperature͒, these columns tend to tilt away from the surface normal, toward the incoming flux, as shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

Shadowing effects on the microstructure of obliquely deposited films

Paritosh

Srolovitz

2002

Journal of Applied Physics

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Two spatial dimension front tracking simulations have been performed to study the growth of polycrystalline, faceted films from randomly oriented nuclei by varying the deposition angle of the incident flux during physical vapor deposition. The orientation of grain columns, the porosity, the crystallographic texture, and grain size are sensitive to the deposition angle. The origin of this effect is widely believed to be associated with shadowing. In order to isolate the effects of shadowing from other physical effects ͑such as surface diffusion, deposition species size, flux divergence, etc.͒, we have constructed a simulation where all of these effects are completely removed. These simulations demonstrate that while many of the observed structural properties of obliquely deposited films are controlled by shadowing, a few key properties cannot be attributed solely to shadowing.

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“…The observation that the lattice planes in the nanowires are not necessarily aligned with the tilt angle of the nanowires has already been reported by Moon and Shin for Co/Pt multilayer thin films. Contrary to that, the c ‐axis of the hcp crystallites in the Co–Cr magnetic thin films is aligned with the nanowire growth direction, as reported by Hagemeyer et al, indicating a strong material‐dependent component for the texture formation.…”

Section: Resultsmentioning

confidence: 53%

Biaxially Textured Titanium Thin Films by Oblique Angle Deposition: Conditions and Growth Mechanisms

Liedtke-Grüner

Grüner

Lotnyk

et al. 2019

Physica Status Solidi (a)

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Growing highly crystalline nanowires over large substrate areas remains an ambiguous task nowadays. Herein, a time-efficient and easy-to-handle bottomup approach is demonstrated that enables the self-assembled growth of biaxially textured Ti thin films composed of single-crystalline nanowires in a singledeposition step. Ti thin films are deposited under highly oblique incidence angles by electron beam evaporation on amorphous substrates. Substrate temperature, angle of the incoming particle flux, and working pressure are varied to optimize the crystallinity in those films. Height-resolved structure information of individual nanowires is provided by a transmission electron microscopy (TEM) nanobeam, high-resolution TEM, and electron diffraction. Ti nanowires are polycrystalline at 77 K, whereas for ≥300 K, single-crystalline nanowires are tendentially found. The Ti crystals grow along the thermodynamically favored c-direction, but the nanowires' tilt angle is determined by shadowing. Biaxially textured Ti thin films require a certain temperature range combined with highly oblique deposition angles, which is proved by X-ray in-plane pole figures. A general correlation between average activation energy for surface self-diffusion and melting point of metals is given to estimate the significant influence of surface self-diffusion on the evolution of obliquely deposited metal thin films.

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Crystallographic texture and morphology of obliquely deposited Co-Cr magnetic thin films on flexible polymeric substrates

Cited by 12 publications

References 13 publications

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Shadowing effects on the microstructure of obliquely deposited films

Biaxially Textured Titanium Thin Films by Oblique Angle Deposition: Conditions and Growth Mechanisms

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