2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits 2015
DOI: 10.1109/ipfa.2015.7224428
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Cu concentration from backside contamination induced STI crack after High Temperature Stress

Abstract: This study presents integrated circuit failure analysis (FA) results of reliability fail devices with high pin leakage (UHAST--als a crack along the STI (shallow trench isolation) sidewall and into Si crystallographic plane. Copper (Cu) was found by EDX analysis underneath Ni silicide layer and migrated into silicon STI edge. One main observation was that the Cu crack occurred systematically on a small active area (p-sub) defined as p-well with minimum design rule distance to n-well active area. The source of … Show more

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