2023
DOI: 10.1109/tdei.2022.3218261
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Cu-ZnO Heterojunction Catalytic SF6/H2 Gas Conversion Mechanism and Reaction Network Construction

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Cited by 2 publications
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“…7 Numerous studies have explored thermal and photoreductive decomposition of SF 6 within electric discharges linked to plasma etching, or through a photolytic reaction at polyisoprene surfaces. [8][9][10][11] Byproducts resulting from these methods of thermal and photoreductive decomposition of SF 6 are mostly in gaseous form and possess toxicity as well as corrosiveness. Until now, catalytic decompositions of SF 6 have been predominantly achieved through heterogeneous reactions, primarily using metal phosphates.…”
Section: Introductionmentioning
confidence: 99%
“…7 Numerous studies have explored thermal and photoreductive decomposition of SF 6 within electric discharges linked to plasma etching, or through a photolytic reaction at polyisoprene surfaces. [8][9][10][11] Byproducts resulting from these methods of thermal and photoreductive decomposition of SF 6 are mostly in gaseous form and possess toxicity as well as corrosiveness. Until now, catalytic decompositions of SF 6 have been predominantly achieved through heterogeneous reactions, primarily using metal phosphates.…”
Section: Introductionmentioning
confidence: 99%