The efficiency of the Si photoanode of photoelectrochemical (PEC) cells in solar water splitting undergoes poor charge separation and transfer process through multiple interfaces. This phenomenon occurs mainly due to a recombination induced by interfacial defects and quantum tunneling effect caused by SiO 2 layer insulation. In this study, the in situ fabrication of nanoepitaxial TiO 2 on Si substrates in constructing TiO 2 /Si heterojunction is performed by combining a self-assembly process and a hydrothermal method. The nanoepitaxial growth process is conducted because of the crystal type and lattice matching between anatase-type TiO 2 and Si substrate. Studies have shown that a minimal insulator SiO 2 layer is left in the heterogeneous interface, which is contacted by a chemical bond. Therefore, a nearly defectfree heterojunction without a SiO 2 insulator layer is obtained. After depositing the common catalyst Ni, a large saturated current density of Ni/TiO 2 /Si photoanode is achieved. This excellent property is caused by fast carrier transfer through the heterogeneous interface, resulting in the efficiency of injection and separation of fast carriers. In comparison with the traditional method, (i.e., the TiO 2 protection film deposited by atom layer deposition (ALD)), the Ni/TiO 2 /Si photoanode fabricated by nanoepitaxial growth has a significantly lower onset potential and remarkably higher current density, which is 11-fold at 1.23 V bias potential. Results confirm that the nanoepitaxy of TiO 2 on Si can improve the stability of Si substrates in an alkaline solution for more than 24 h.Crystalline silicon is an important semiconductor material in electronic and photovoltaic industries due to its availability of large single crystals, high purity, effective conductivity engineering, and natural abundance. This maturity, together with its 1.12 eV bandgap, the optimal value for capturing the solar spectrum enables Si to be almost ideally suited for photovoltaic applications. [1] However, the Si-based materials for PEC solar fuel conversion focus on altering the surface kinetics to reduce the current efficiency for the growth of insulating SiO 2 and improve photoelectrode efficiency and stability. [2] The ultimate goal of PEC device is to produce clean fuels involving the reduction of CO 2 to lower hydrocarbons or water splitting to H 2 . In photocatalytic water splitting, hydrogen evolution is generated in photocathode, and O 2 evolution is generated in photoanode. When it is used as a photoanode, crystalline silicon must be stabilized against corrosion or passivation in alkaline solution. [3] For these purposes, introducing a heterogeneous coating, such as Ni, [4,5] MnO x , [6] NiO x , [7] TiO 2 , [8] Co/Co-Pi, [9] ITO, [10] CuO, [11] Cu, [12] and Ti, [13] on the Si surface is an efficient approach. In comparison with other materials, TiO 2 shows several advantages, including good light transmission property, efficient carrier transfer, low cost, and non-toxicity. TiO 2 has been widely used as a collecting la...