“…The literature reports on chemiresistive oxygen concentration sensors based on undoped β-Ga 2 O 3 thin films operating at high temperature (1000 • C) [18,19] and, more recently, on β-Ga 2 O 3 thin films doped with Si, and Cr 2 O 3 operating at a medium temperature (400 • C) [20,21]. The conductivity of thin and thick films of gallium oxide increases in the presence of ethanol, methanol, carbon monoxide, acetone, hydrogen, hydrogen sulfide, and ammonia in the ambient atmosphere [22][23][24]. Moreover, β-Ga 2 O 3 thin films exhibit hydrophobic properties, which is why the humidity of the ambient atmosphere has little effect on their gas sensing properties, even at room temperature [24].…”