2020
DOI: 10.3103/s1060992x20040025
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Current Trends in Development of Optical Metrology

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Cited by 6 publications
(4 citation statements)
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References 51 publications
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“…[4,13]. Specific features of the PSs make them valuable instruments of optical metrology [123][124][125]. Like the familiar scalar singularities (e.g., optical vortices), the PSs create conditions for specific energy flow distributions favorable for the particles' trapping, guiding and manipulation in nanoengineering techniques [13,106,126,127].…”
Section: Discussionmentioning
confidence: 99%
“…[4,13]. Specific features of the PSs make them valuable instruments of optical metrology [123][124][125]. Like the familiar scalar singularities (e.g., optical vortices), the PSs create conditions for specific energy flow distributions favorable for the particles' trapping, guiding and manipulation in nanoengineering techniques [13,106,126,127].…”
Section: Discussionmentioning
confidence: 99%
“…The data presented testify that observations of the mechanical motions of particles trapped in complex structured fields can give valuable information on the field properties and, especially, on the distribution of internal energy flows [6,9,10,30]. On the other hand, micro-and nano-objects with various optical properties (refractive index, external shape, and internal structure) differently react on the ponderomotive factors of the light field.…”
Section: Them (Figuresmentioning
confidence: 58%
“…obtain its three-dimensional landscape. This fundamental difference distinguishes the proposed approach from the existing techniques described earlier [10][11][12][13][14][15][16] where only the data on the rough surface inhomogeneity is available.…”
Section: Discussionmentioning
confidence: 91%
“…In optical methods, information about the surface roughness is contained in the optical beam, obtained via the scattering of the probe radiation by the probed surface [6]. Among the optical approaches, the most common are methods [7] using optical profilometers [8,9], interference techniques [10][11][12][13], methods based on the speckle-correlation [14,15] and the light scattering phenomena [16]. It is the optical methods that enable the permanent on-line monitoring of the surface state in the course of technological process.…”
Section: Introductionmentioning
confidence: 99%