2000
DOI: 10.1109/16.861581
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Current-voltage characteristics of high current density silicon Esaki diodes grown by molecular beam epitaxy and the influence of thermal annealing

Abstract: We present the characteristics of uniformly doped silicon Esaki tunnel diodes grown by low temperature molecular beam epitaxy (= 275 C) using in situ boron and phosphorus doping. The effects of ex situ thermal annealing are presented for temperatures between 640 and 800 C. A maximum peak to valley current ratio (PVCR) of 1.47 was obtained at the optimum annealing temperature of 680 C for 1 min. Peak and valley (excess) currents decreased more than two orders of magnitude as annealing temperatures and times wer… Show more

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Cited by 52 publications
(29 citation statements)
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“…Based on III=V-heterostructures a high maturity [4,5] has been demonstrated. More recently, Si-based interband [6,7] and resonant [8,9] tunnelling diodes (RTD) also show potential for circuit production [7]. The possible implementation of TD in circuits is strictly coupled to a successful exploitation of the negative-di erential resistance (NDR) characteristics.…”
Section: Introductionmentioning
confidence: 99%
“…Based on III=V-heterostructures a high maturity [4,5] has been demonstrated. More recently, Si-based interband [6,7] and resonant [8,9] tunnelling diodes (RTD) also show potential for circuit production [7]. The possible implementation of TD in circuits is strictly coupled to a successful exploitation of the negative-di erential resistance (NDR) characteristics.…”
Section: Introductionmentioning
confidence: 99%
“…The crystal growth techniques, such as MBE or chemical vapor deposition (CVD), on the other hand, allows a formation of atomically controlled interface. In fact, the high peak current density of 4.7 10 A/cm , has recently been obtained from an MBE-grown Si Esaki tunnel diode, and this is a promising figure for high-speed operation [10]. Thus, Si-STTs with a large current drive capability will also be made possible by optimization of the device structure and/or fabrication method.…”
Section: Discussionmentioning
confidence: 99%
“…A SiGe/Si multiple quantum well structure was grown by molecular beam epitaxy (MBE) on Si(001) substrates at the relatively low growth temperature of 400 "C. The MBE instrument was an EPI620 system [10]. The quantum wells are nominally 1.6 nm Sio.7Geo.35 and boron doped to have a sheet carrier concentration of 1.2el2 cm'^, sandwiched between 1 nm Si barrier and further separated by 10 nm Sio.gGeo.i spacer layers.…”
Section: Methodsmentioning
confidence: 99%