546.281:541.138 High-temperature and electrochemical oxidation of transition metal silicides, which are widely used in microelectronics as ohmic contacts and protective coatings for high-temperature alloys, are discussed in this review. The process of oxide film formation during annealing or anodizing is extremely important for both applications of silicides. It is discussed for three disilicides: MoSi 2 , WSi 2 , and TiSi 2 . It has been shown that different types of oxide films may form on the disilicide surface depending on the thermodynamic (formation enthalpies of silicides and associated oxides) and kinetic (diffusion coefficients of silicon in silicide and oxygen diffusivity in oxide) factors: onephase (MoSi 2 ), mixed (WSi 2 ), and multilayer (TiSi 2 ) films. The "silicide pest" phenomenon is discussed in terms of thermodynamic, kinetic, and structural factors influencing the pesting. Analysis of electrochemical oxidation mechanisms for silicides in various electrolyte media reveals numerous similarities between anodic and high-temperature oxidation mechanisms. It is shown that slow silicon transport during anodic treatment at room temperature leads to the formation of multiphase mixed oxide films under electrochemical polarization.Keywords: transition metal silicides, kinetics of high-temperature oxidation, formation mechanism, protective oxide films containing SiO 2 , anodic electrochemical oxidation, electrolyte solutions.Binary refractory compounds of elements from groups 4-6 of the Periodic Table with carbon, boron, nitrogen, and silicon--carbides, borides, nitrides, silicides, and associated composites⎯are very promising materials owing to their excellent, as compared with the initial metals, high-temperature oxidation resistance and chemical stability. These materials are widely used in different engineering areas. New composite materials based on refractory compounds with desired properties constantly show up.Transition metal silicides are widely used in modern engineering. They are remarkable for their significant physical and technical properties: relatively low density, metal conductivity, high corrosion resistance, which are needed in engineering areas using high temperatures, rates, loads, and corrosive media. These are aerospace structures, high-temperature heaters, corrosion protective coatings on refractory alloys, etc. [1]. For example, the high melting temperature combined with the corrosion resistance of semiconducting silicides (Cr, Mn, and Fe disilicides) are the very properties required for thermoelectric generators that convert solar energy into electric energy.