d31 Type inplane bending multilayer piezoelectric microactuators—a design concept and its applications

Wang, Zhihong; Zhu, Weiguang; Yao, Xi

doi:10.1016/s0924-4247(02)00206-6

Cited by 18 publications

(9 citation statements)

References 12 publications

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“…However, these are often desk-topsized devices, and smaller devices are preferred for many applications. Microactuators have been proposed for a multitude of nanopositioning applications, including the control of the read/write head in a hard disk drive [4][5][6][7][8][9][10][11][12], tilting mirrors and gratings for directing lasers [13,14], a Fourier transform spectrometer [15], optical switches [16,17], a bar code scanner [18], a Fresnel lens [19], an atomic force microscope [20], a scanning tunneling microscope [21], fluid pumps and valves [22,23] and electrical switches [24][25][26][27].…”

Section: Introductionmentioning

confidence: 99%

Design and characterization of a dual-stage, thermally actuated nanopositioner

Hubbard¹,

Howell²

2005

J. Micromech. Microeng.

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A nanopositioner is presented that has two stages for independent coarse and fine position control. Thermal microactuators operate both stages. The first stage includes a bistable mechanism: it travels 52 µm between two discrete positions. The second stage is mounted on the first stage and moves continuously through an additional 8 µm in the same direction as the first stage. Three approaches to the control of the second stage were evaluated in terms of accuracy and manufacturability, and one was selected for the design of the nanopositioner. The device was surface micromachined in a two-layer polysilicon process. Experiments were performed to characterize the resolution, repeatability, hysteresis and thermal drift of the second stage of the nanopositioner with open-loop control. Position measurements were obtained from scanning electron micrographs by a numerical procedure, which is described in detail. The nanopositioner demonstrated 170 nm resolution and repeatability within 124 nm. The hysteresis of the second stage was 6% of its full range. The nanopositioner drifted 25 nm in the first 60 min of operation with a time constant of about 6 min. The dual-stage nanopositioner may be useful for applications such as variable optical attenuators or wavelength-specific add–drop devices.

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Section: Introductionmentioning

confidence: 99%

Design and characterization of a dual-stage, thermally actuated nanopositioner

Hubbard¹,

Howell²

2005

J. Micromech. Microeng.

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“…2. [6][7][8] Two separate disks of a piezoelectric element are metallized and poled in the thickness expansion mode. They are then assembled in a þ À þ À stack and mechanically bonded.…”

Section: Constructionmentioning

confidence: 99%

“…As a result, the transducer bends. However, constraint is possible to obtain so as to make an effective flexural vibration, [8][9][10] because the transducer generates a parasitic vibration which may have a negative influence on the vibration of the transducer without the constraint. Finally, the transverse vibration is converted into a flexural vibration because of the constraint by the metal disk at the transducer as shown in Fig.…”

Section: Operating Principlementioning

confidence: 99%

Analysis of Tiny Piezoelectric Ultrasonic Linear Motor

Lee

Yoo

et al. 2006

jjap

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A modified structure for tiny ultrasonic linear motors has been developed, and various shaft materials have been tested in order to improve dynamic properties. The shaft material has a direct influence on efficiency, reliability, and quality of the motors and their dynamic properties. The shaft material is crucial to achieve high performance. Shafts of with various materials, such as a stainless steel, stainless steel coated with diamond like carbon (DLC), a Pyrex, and a graphite, can make it possible to improve dynamic properties of the motors over a wide range of tribological conditions. For the motor with a stainless steel shaft coated with DLC at 47 kHz, its velocity is 6.5 mm/s and its force is 110 mN. When the motor has a Pyrex shaft, a force of 140 mN is reached at 52 kHz. Accordingly, the maximum force produced by a motor with a graphite shaft is estimated as 97 mN. The velocity of this motor was 15 mm/s. We found that graphite has a fine surface and a directional texture which can help a moving element achieve linear motion. Finally, the use of a cap resulted in significantly improving stable operation. A motor with a graphite or a Pyrex shaft showed very stable operation and improved dynamic characteristics.

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“…adopted for this purpose, as well as achieving a large stroke at a low voltage [12,13]. In another example, piezoelectric shearmovers stacked on the base plate were adopted to improve shock resistance of the actuated suspension [4].…”

Section: Introductionmentioning

confidence: 99%

A piezoelectric quad-morph actuated suspension for hard disk drives

Lau¹,

Du²

2006

J. Micromech. Microeng.

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This paper presents a new milli-actuator using a piezoelectric quad-morph for fine head positioning in hard disk drives (HDDs). The newly proposed piezoelectric quad-morph is configured to produce a diagonal actuation, driving a parallel mechanism embodied into a suspension base plate into a lateral stroke. Finite element modeling shows the actuated suspension achieves a high sway frequency of 13 kHz and an adequate stroke. A parametric study shows that extending the lengths of the quad-morph and the parallel beams can improve both the sway frequency and the lateral stroke. The actuated suspension can also be reinforced with ribs for enhancing shock resistance and dynamic performance, yet without compromising lateral stroke generation. A prototype of the new design is fabricated and manually assembled using a bulk piezoelectric plate and a photo-chemically machined 0.1 mm thick stainless steel load beam. The driving principle of the quad-morph is tested and proven a viable and economical method to accomplish fine head positioning.

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d31 Type inplane bending multilayer piezoelectric microactuators—a design concept and its applications

Cited by 18 publications

References 12 publications

Design and characterization of a dual-stage, thermally actuated nanopositioner

Design and characterization of a dual-stage, thermally actuated nanopositioner

Analysis of Tiny Piezoelectric Ultrasonic Linear Motor

A piezoelectric quad-morph actuated suspension for hard disk drives

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