Damascene Process Development for Low-Loss Photonics Devices with Applications in Frequency Comb
Qiaoling Zhou,
Yejia Jin,
Shaonan Zheng
et al.
Abstract:Silicon nitride (SiN) is emerging as a material of choice for photonic integrated circuits (PICs) due to its ultralow optical losses, absence of two-photon absorption in telecommunication bands, strong Kerr nonlinearity and high-power handling capability. These properties make SiN particularly well-suited for applications such as delay lines, chip-scale frequency combs and narrow-linewidth lasers, especially when implemented with thick SiN waveguides, which is achieved through low-pressure chemical vapor depos… Show more
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