2019
DOI: 10.1149/2.0261912jss
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Damp Heat Durability of Al-Doped ZnO Transparent Electrodes with Different Crystal Growth Orientations

Abstract: Al-doped ZnO (AZO) transparent electrodes deposited by reactive sputtering are investigated to clarify the influences of crystal orientations on film durability. During the deposition, argon gas flow was varied from 3 to 60 sccm amidst fixed oxygen gas flow at 60 sccm. With increasing argon gas flow, the crystal orientations exhibit a major transition from ( 110) to (002). During damp heat test at 85% relative humidity and 85°C, the films with more variations in crystal orientations exhibit more decreased Hall… Show more

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Cited by 3 publications
(2 citation statements)
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“…As the R O2 was increased, the photocatalytic activity decreased with the R O2 values up to 30% and increased with the R O2 values over 40%. We investigated the oxygen vacancy concentration, and it decreased with the R O2 values up to 30-40%, which is a general behavior under the oxygen-rich conditions [15,20]. On the other hand, interestingly, the vacancy concentration was increased with the R O2 values of more than 40%.…”
Section: Introductionmentioning
confidence: 88%
“…As the R O2 was increased, the photocatalytic activity decreased with the R O2 values up to 30% and increased with the R O2 values over 40%. We investigated the oxygen vacancy concentration, and it decreased with the R O2 values up to 30-40%, which is a general behavior under the oxygen-rich conditions [15,20]. On the other hand, interestingly, the vacancy concentration was increased with the R O2 values of more than 40%.…”
Section: Introductionmentioning
confidence: 88%
“…Mirletz et al [21] showed that employing a protective capping layer of APTES (3-ami-nopropyltriethoxysilane) resulted in greatly reduced resistivity increase percentage for AZO electrodes from 250% to 60% upon DH exposure. Machda et al [22] examined the effect of the crystal orientations on AZO damp heat stability, AZO samples with different crystal growth orientations (110) and (002) were fabricated via sputtering at various argon gas flow mixed with a fixed oxygen gas flow. A change of crystal growth orientation from (110) to (002) was reported at higher argon gas flow during deposition.…”
Section: Introductionmentioning
confidence: 99%