Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering

Tohsophon, Thanaporn; Hüpkes, J.; Calnan, Sonya; Reetz, W.; Rech, Bernd; Beyer, W.; Sirikulrat, N.

doi:10.1016/j.tsf.2005.12.130

Cited by 76 publications

(74 citation statements)

References 11 publications

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“…A similar damp heat degradation behavior has been observed also for sputtered and CVD ZnO films by several authors. 4,[21][22][23][24][25][26] They propose that the diffusion of environmental gasses (e.g., oxygen, carbon dioxide, and water vapor) along the grain boundaries of ZnO films leads to a local increase in the density of traps states for the free carriers and in a higher potential barrier, which hinders the mobility of the carriers among the grains. 14 The carriers flow across the grain boundaries via thermionic emission and tunneling increases with the Fermi level, and therefore, films with higher carrier density are typically found to have more stable electrical properties in a harsh environment, as also shown in Figs.…”

Section: Resultsmentioning

confidence: 99%

On the environmental stability of ZnO thin films by spatial atomic layer deposition

Illiberi¹,

Scherpenborg²,

Theelen³

et al. 2013

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Undoped and indium-doped ZnO films have been deposited by atmospheric spatial atomic-layer-deposition (spatial-ALD). The stability of their electrical, optical, and structural properties has been investigated by a damp-heat test in an environment with 85% relative humidity at 85 °C. The resistivity of the ZnO films increased during damp-heat exposure mainly due to a sharp decrease in the carrier mobility, while the carrier density and transparency degraded only partially. The increase in resistivity can be ascribed to a degradation of the structural properties of ZnO films, resulting in a higher level of tensile stress, as indicated by x-ray diffraction analysis, and in a reduced near-ultravoilet emission level in their photoluminescence spectra. Al2O3 thin (25–75 nm) films grown by spatial-ALD at 0.2 nm/s are used as moisture barrier to effectively enhance the stability of the electrical and structural properties of the films.

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Section: Resultsmentioning

confidence: 99%

On the environmental stability of ZnO thin films by spatial atomic layer deposition

Illiberi¹,

Scherpenborg²,

Theelen³

et al. 2013

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…[183] IO:H and AZO, on the contrary, showed poorer electrical stability under damp heat conditions mainly due to the introduction of water at grain boundaries. [183,184] In the case of IO:H it has been recently demonstrated that damp heat degradation is strongly linked to the hydrogen content in the films. IO:H films with hydrogen content lower than 5 at.% exhibit stable electrical properties after exposure to DH conditions.…”

Section: Stability Under Thermal and Humid Environmentsmentioning

confidence: 99%

Transparent Electrodes for Efficient Optoelectronics

Morales‐Masis

Wolf

Woods‐Robinson

et al. 2017

Adv Elect Materials

364

288

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With the development of new generations of optoelectronic devices that combine high performance and novel functionalities (e.g., flexibility/bendability, adaptability, semi or full transparency), several classes of transparent electrodes have been developed in recent years. These range from optimized transparent conductive oxides (TCOs), which are historically the most commonly used transparent electrodes, to new electrodes made from nano‐ and 2D materials (e.g., metal nanowire networks and graphene), and to hybrid electrodes that integrate TCOs or dielectrics with nanowires, metal grids, or ultrathin metal films. Here, the most relevant transparent electrodes developed to date are introduced, their fundamental properties are described, and their materials are classified according to specific application requirements in high efficiency solar cells and flexible organic light‐emitting diodes (OLEDs). This information serves as a guideline for selecting and developing appropriate transparent electrodes according to intended application requirements and functionality.

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“…[3][4][5][6] Research is continuing to improve the stability of AZO through different deposition techniques and conditions. [7][8][9][10][11][12] However, most degradation and performance studies of AZO …”

Section: Introductionmentioning

confidence: 99%

Impacts of Humidity and Temperature on the Performance of Transparent Conducting Zinc Oxide

Yaklin

Schneider

Norman

et al. 2010

2010 35th IEEE Photovoltaic Specialists Conference

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The impact of humidity and temperature on a zinc oxide based transparent conducting oxide (TCO) was assessed under accelerated aging conditions. An in situ electroanalytical method was used to monitor the electrical properties for a conducting zinc oxide under controlled atmospheric (humidity, temperature and irradiation) conditions.A review of thin film photovoltaic (PV) literature has shown one major failure mode of cells/modules is associated with the ingress of water into modules in the field. Water contamination has been shown to degrade the performance of the TCO in addition to corroding interconnects and other conductive metals/materials associated with the module. Water ingress is particularly problematic in flexible thin film PV modules since traditional encapsulates such as poly(ethyl vinyl acetate) (EVA) have high water vapor transmission rates. The accelerated aging studies of the zinc oxide based TCOs will allow acceleration factors and kinetic parameters to be determined for reliability purposes.

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Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering

Cited by 76 publications

References 11 publications

On the environmental stability of ZnO thin films by spatial atomic layer deposition

On the environmental stability of ZnO thin films by spatial atomic layer deposition

Transparent Electrodes for Efficient Optoelectronics

Impacts of Humidity and Temperature on the Performance of Transparent Conducting Zinc Oxide

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