Damping analysis of a quad beam MEMS piezoresistive accelerometer

Jency, J. Grace; Sekar, M.; Sankar, A. Ravi

doi:10.1080/02286203.2020.1734740

Cited by 9 publications

(6 citation statements)

References 14 publications

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“…To improve the damping characteristics, hence the stability of the structure, an electroplated gold mass is kept on the proof mass with a dimension of 2500 μm × 2500 μm × 20 μm and an air gap of 27 μm between the mass and the frame. 28 Another similar structure was proposed by Biswas and Gogoi, where p-doped piezoresistance was placed at the junction of proof mass and flexure, and also at the junction of flexure and frame, in a Wheatstone bridge structure. This work focused on reducing cross-axis sensitivity in the device, enabling use in biomotion applications.…”

Section: ■ Conventional Mems Acceleration Sensorsmentioning

confidence: 98%

“…The proof mass is reported to have optimum dimension of 3500 μm × 3500 μm × 270 μm and maximum sensitivity of 0.111 mV/ g . To improve the damping characteristics, hence the stability of the structure, an electroplated gold mass is kept on the proof mass with a dimension of 2500 μm × 2500 μm × 20 μm and an air gap of 27 μm between the mass and the frame . Another similar structure was proposed by Biswas and Gogoi, where p-doped piezoresistance was placed at the junction of proof mass and flexure, and also at the junction of flexure and frame, in a Wheatstone bridge structure.…”

Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

See 1 more Smart Citation

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers' sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

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Section: ■ Conventional Mems Acceleration Sensorsmentioning

confidence: 98%

Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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show abstract

“…It is widely used in inertial navigation, attitude measurement, and other scientific and industrial fields [1]. According to the signal type, accelerometers can be divided into capacitive [2], piezoresistive [3], piezoelectric [4], resonant accelerometers, and so on. Among them, the resonant accelerometer measures acceleration based on the highly sensitive response of the resonant frequency of the oscillator to stress.…”

Section: Introductionmentioning

confidence: 99%

A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams

Xiao

Zhang

et al. 2022

Sensors

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In this paper, a novel two-axis differential resonant accelerometer based on graphene with transmission beams is presented. This accelerometer can not only reduce the cross sensitivity, but also overcome the influence of gravity, realizing fast and accurate measurement of the direction and magnitude of acceleration on the horizontal plane. The simulation results show that the critical buckling acceleration is 460 g, the linear range is 0–89 g, while the differential sensitivity is 50,919 Hz/g, which is generally higher than that of the resonant accelerometer reported previously. Thus, the accelerometer belongs to the ultra-high sensitivity accelerometer. In addition, increasing the length and tension of graphene can obviously increase the critical linear acceleration and critical buckling acceleration with the decreasing sensitivity of the accelerometer. Additionally, the size change of the force transfer structure can significantly affect the detection performance. As the etching accuracy reaches the order of 100 nm, the critical buckling acceleration can reach up to 5 × 104 g, with a sensitivity of 250 Hz/g. To sum up, a feasible design of a biaxial graphene resonant accelerometer is proposed in this work, which provides a theoretical reference for the fabrication of a graphene accelerometer with high precision and stability.

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“…They have been applied to the fields of automobile [ 1 , 5 ], healthcare [ 2 ], mobile devices [ 3 ], and electronic devices [ 4 ]. MEMS acceleration sensors are divided into capacitive [ 6 , 7 ], piezoelectric [ 8 , 9 ], piezoresistive [ 10 , 11 ], Hall effect [ 12 , 13 ], magnetoresistive [ 14 , 15 ] and heat transfer [ 16 , 17 ] types according to the sensing method used. The most common type of MEMS acceleration sensors are capacitive because of their simple structure, high productivity, linear stability, durability, and insensitivity to temperature [ 18 , 19 ].…”

Section: Introductionmentioning

confidence: 99%

Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating

Lee

2020

Sensors

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This paper presents the fabrication by means of roll-to-roll slot-die coating and characterization of air gap-based cantilever type capacitive acceleration sensors. As the mass of the sensor moves in the opposite direction of the acceleration, a capacitance change occurs. The sensor is designed to have a six layers structure with an air gap. Fabrication of the air gap and cantilever was enabled by coating and removing water-soluble PVA. The bottom electrode, the dielectric layer, and the sacrificial layer were formed using the roll-to-roll slot-die coating technique. The spacer, the top electrode, and the structural layer were formed by spin coating. Several kinds of experiments were conducted for characterization of the fabricated sensor samples. Experimental results show that accelerations of up to 3.6 g can be sensed with an average sensitivity of 0.00856 %/g.

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Damping analysis of a quad beam MEMS piezoresistive accelerometer

Cited by 9 publications

References 14 publications

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams

Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating

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