2014
DOI: 10.1063/1.4902430
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Damping of metallized bilayer nanomechanical resonators at room temperature

Abstract: We investigate the influence of gold thin-films subsequently deposited on a set of initially bare, doubly clamped, high-stress silicon nitride string resonators at room temperature. Analytical expressions for resonance frequency, quality factor and damping for both in- and out-of-plane flexural modes of the bilayer system are presented, which allows for the determination of effective elastic parameters of the composite structure from our experimental data. We find the inverse quality factor to scale linearly w… Show more

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Cited by 15 publications
(9 citation statements)
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“…The spatial profile of graphene eigenmodes can be mapped by probing thermal noise spectra at varying positions on the graphene membrane, see SI. The slight elliptical structure and the frequency splitting observed on higher order modes reflects the presence of a residual 20 MPa stress along the diagonal direction [23,24], attributed to the graphene transfer process. Also visible on the thermal noise spectrum are sharp peaks corresponding to higher order eigenmodes of the Si 3 N 4 nanomembrane, whose fundamental mode oscillates around 100 kHz.…”
mentioning
confidence: 99%
“…The spatial profile of graphene eigenmodes can be mapped by probing thermal noise spectra at varying positions on the graphene membrane, see SI. The slight elliptical structure and the frequency splitting observed on higher order modes reflects the presence of a residual 20 MPa stress along the diagonal direction [23,24], attributed to the graphene transfer process. Also visible on the thermal noise spectrum are sharp peaks corresponding to higher order eigenmodes of the Si 3 N 4 nanomembrane, whose fundamental mode oscillates around 100 kHz.…”
mentioning
confidence: 99%
“…As an added benefit, for materials such as stoichiometric silicon nitride, the high internal tension that draws a doubly clamped beam taut enough to become stringlike leads to correspondingly high mechanical quality factors. These high values aid in detection [29][30][31] and are maintained even in the presence of a metallic overlayer added to the device for the purpose of functionalization [32,33].…”
Section: Introductionmentioning
confidence: 96%
“…( 1)). Moreover, adding a metal component is known to change the mechanical damping of nano-strings 37,38 . 1) and ( 2).…”
mentioning
confidence: 99%