Data acquisition and processing modes for quantitative Auger electron spectroscopy

Abstract

Auger electron spectroscopy has been applied to the quantitative surface analysis of a series of metals (Ag, Cd, In, Sn), Indium-tin alloys, Indium and tin oxides, and Indlum-tln oxide (ITO) films. Spectra were obtained by two methods: (1)the conventional modulation technique, which results In the derivative spectrum, and (2) a direct current measurement, which gives an undifferentiated spectrum. For data collected In the latter mode, an Instrumental approach and secondary electron background correction are discussed. Quantitative results obtained by using this approach are shown to be more accurate than the traditional measurement method.

Chemometrics

“…These ranged from control of a titrator using a microprocessor to complex image processing in computerized tomography. Other applications of computer controlled instruments have appeared in the areas of electrochemistry (PS3-4, PS29, PS32), ion selective electrode potentiometry (PS5), uv-vis spectrometry (PS33), thermogravimetry (PS19), thin-layer chromatography (PS2), size exclusion or gel permeation chromatography (PS20, PS27), liquid chromatography interfaced to infrared spectrometry (PS31), mass spectrometry (PS8,PS37), radioimmuno-assay (PS22), atomic absorption spectrometry (PS1), auger spectrometry (PS7), and laser spectrometry (PS23).…”

“…Christenson and McGlothlin have used first and second derivative flourescence spectral analysis over the 325-385 nm excitation region to study fluorescent products of metanephrine and catecholamine (SP5). The derivative Auger electron spectra of many metals, alloys and their oxides have been obtained by the conventional modulation technique and analyzed quantitatively (SP2).…”