2023
DOI: 10.1063/5.0133840
|View full text |Cite
|
Sign up to set email alerts
|

Data processing techniques for ion and electron-energy distribution functions

Abstract: Retarding field energy analyzers and Langmuir probes are routinely used to obtain ion and electron-energy distribution functions (IEDF and EEDF). These typically require knowledge of the first and second derivatives of the current–voltage characteristics, both of which can be obtained using analog and numerical techniques. A frequent problem with electric-probe plasma diagnostics is the noise from the plasma environment and measurement circuits. This poses challenges inherent to differentiating noisy signals, … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
2
0

Year Published

2023
2023
2025
2025

Publication Types

Select...
8

Relationship

2
6

Authors

Journals

citations
Cited by 12 publications
(5 citation statements)
references
References 63 publications
0
2
0
Order By: Relevance
“…The GF method effectively eliminates random noise and fluctuations in the data through weighted averaging, making the IC curve smoother and providing a reliable basis for subsequent feature extraction. 33 The VW+GF methods cleverly balance the accuracy of data processing and the operability of practical applications, effectively remove noise, simplify the processing flow, and provide a practical and efficient solution for feature extraction of IC curves. The comparison of IC curves under different processing methods is shown in Fig.…”
Section: Extraction and Correlation Analysis Of Health Factorsmentioning
confidence: 99%
“…The GF method effectively eliminates random noise and fluctuations in the data through weighted averaging, making the IC curve smoother and providing a reliable basis for subsequent feature extraction. 33 The VW+GF methods cleverly balance the accuracy of data processing and the operability of practical applications, effectively remove noise, simplify the processing flow, and provide a practical and efficient solution for feature extraction of IC curves. The comparison of IC curves under different processing methods is shown in Fig.…”
Section: Extraction and Correlation Analysis Of Health Factorsmentioning
confidence: 99%
“…A planar Langmuir probe (LP) and an rf compensated cylindrical LP have been used to estimate the ion density from the ion saturation method and the electron temperature from the Druyvesteyn method, as previously described in detail [28,34]. The effective electron temperatures T e on-axis had only been measured at a few axial loci for the B 0 = 300 G and B 0 = 600 G cases as well as under the solenoids for other values of B 0 .…”
Section: Plasma Diagnosticsmentioning
confidence: 99%
“…Each measured current is the average of 200V D sweeps. The collected current is fed into an analog differentiator to obtain the IEDF from the first derivative of the I-V characteristics [41]. The local plasma potential V p and the ion beam potential V B are then defined as the location of the first and second peaks in the IEDF [6,10,40,42].…”
Section: Plasma Diagnosticsmentioning
confidence: 99%