DC Glow Discharge Plasma Characteristics in Ar/O2 Gas Mixture

Abdulameer

2022

eijs

In this present paper, an experimental study of some plasma characteristics in dielectric barrier discharge (DBD) system using several variables, such as different frequencies and using two different electrodes metals(aluminium (Al) and copper (Cu)), is represented. The discharge plasma was produced by an AC power supply source of 6 and 7 kHz frequencies for the nitrogen gas spectrum and for two different electrodes metals(Al and Cu). Optical emission spectrometer was used to study plasma properties (such as electron temperature ( ), electron number density ( ), Debye length ( ), and plasma frequency ( )). In addition, images were analysed for the plasma emission intensity at atmospheric air pressure.

Section: Introductionmentioning

confidence: 99%

Study of Some Plasma Characteristics in Dielectric Barrier Discharge (DBD) System

Kadhim

Abdulameer

2022

eijs

“…Physical vapor deposition (PVD) is when the species sputtered off a cathode target are employed as film-forming material. Spraying becomes easier When the cathode target is subjected to gas discharge, either a D.C. or an A.C. discharges [1,2]. Magnetron sputtering discharge (MSD) [3], ion beam sputter deposition, on the other hand, is a well-known PVD process [4].…”

Section: Introductionmentioning

confidence: 99%

Influence of Cylindrical Electrode Configuration on Plasma Parameters in a Sputtering System

Bard

2022

eijs

In the present work, the effect of the cylindrical configurations of the sputtering device electrodes on the plasma parameters (Debye length, electron temperature, electron density, plasma frequency) is studied. Also, the effect of the argon gas pressure on the discharge properties is examined with gas pressures of (0.08, 0.2, 0.4 and 0.6) Torr. The properties of the plasma are diagnosed by optical emission spectrometry. The spectroscopic method is adopted for examining the atomic spectra of argon emission. The electron temperature is determined by the Boltzmann method. While, the Stark-widening method was employed for calculating the electron number density. The voltage against current curves of the cylindrical sprayer discharges shows the voltage to be nearly constant with slight increase in current. An increase in pressure causes the cathode cascades to compress and the negative glow to become thinner and more luminous. Plasma properties such as electron temperature and Debye length decrease with increasing pressure, while electron number density and plasma frequency increase.

“…This allows the use of many dust substances which have resonances in the IR or visible. Jabur et al [15] the sample of O 2 /Ar gaseous mixture by plasma-based DC magnetron sputtering with niobium metal as a target material Plasma diagnosis via the Optical Emission Spectroscopy (OES) method was used to achieve Te and Ne mixture values of 20 %, 30 %, 50%, and 70% in the Ar/O 2 system. Hameed and Kadhem [16] constructed a gliding arc discharge (GAD) with a water spray system.…”

Section: Introductionmentioning

confidence: 99%

Influence of Fe2O3 Dust Particles on the Plasma Characteristics of D.C Sputtering System

Abdulghani

2022

eijs

This work is an experimental study conducted to study the effects of iron oxide dust particles (Fe2O3) on the characteristics of DC discharge plasma in argon gas under vacuum. Electron temperature ( ) and electron density (ne) were calculated by Boltzmann plots and Stark broadening, respectively. The results show that both the electron density and plasma frequency ( ) increased with the operating pressure. While, and Debye length ( ) decreased with pressure. The glow discharge is more stable with the Fe2O3-dust particles; all dust plasma parameters have lower values than those of the dust-free plasma.