Decrease of the resonance bandwidth of micromechanical oscillators by phase control of the driving force

Tamayo, Javier; Lechuga, Laura M.

doi:10.1063/1.1571228

Cited by 11 publications

(3 citation statements)

References 13 publications

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“…The resonance sensing method, which monitors the change in mass by measuring the change in resonant frequency, seems to be superior to the bending measurement method in terms of the sensitivity and long-term stability. Many efforts have made to improve the sensitivity of the resonating mass sensor, including the scaling down of mechanical elements [16], the improvement of the mechanical Q factors [12,[16][17][18] the electrical enhancement of Q factors [19] and parametric amplification [6]. Scaling down of a resonating sensor is the simplest way to raise the sensitivity, and mass sensitivity at the attogram (10 −18 ) and femtogram (10 −15 ) levels has been demonstrated in vacuum and atmosphere, respectively [11,9].…”

Section: Introductionmentioning

confidence: 99%

Mass sensing with resonating ultra-thin silicon beams detected by a double-beam laser Doppler vibrometer

Ono¹,

Esashi²

2004

Meas. Sci. Technol.

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This paper reports on mass sensing with 33 nm thick single-crystalline cantilevers by a double-beam laser Doppler vibrometer. The resonant frequency of an oscillating thin cantilever beam is very sensitive to a loaded mass. However, the drift of the resonance, due to gas adsorption and mechanical instability, limits the minimum detectable mass in general. Two cantilevers for sensing and its reference will compensate their influences. Two cantilevers were made to self-oscillate by electrostatic actuation at different resonant frequencies. A 10 pg sample (a particle of organosilicon monomer) was mounted at the end of one cantilever, and thermogravimetry of the sample using the two cantilevers was demonstrated. The cantilevers were heated up by a heater in vacuum, and the change in mass was detected from the change in resonant frequency. The exact temperature change can be estimated from the change in resonant frequency of one cantilever as a reference. The derivative of the frequency change, corresponding to desorbed mass, clearly shows a peak of mass desorption at about 270 • C.

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Section: Introductionmentioning

confidence: 99%

Mass sensing with resonating ultra-thin silicon beams detected by a double-beam laser Doppler vibrometer

Ono¹,

Esashi²

2004

Meas. Sci. Technol.

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“…Increasing the sensitivity of the probe using a phase shifter without affecting the oscillation amplitude is suggested by Tamayo and Lechuga 15 . The imaging bandwidth of a tapping-mode AFM probe under Q-control is analyzed by Kokavecz et al 16 .…”

Section: Introductionmentioning

confidence: 99%

“…The effect of controlling Q-factor on the sensitivity of oscillation amplitude and phase signal is investigated by Kokavecz et al 14 . Increasing the sensitivity of the probe using a phase shifter without affecting the oscillation amplitude is suggested by Tamayo and Lechuga 15 . The imaging bandwidth of a tapping-mode AFM probe under Q-control is analyzed by Kokavecz et al 16 .…”

Section: Introductionmentioning

confidence: 99%

Adaptive Q control for tapping-mode nanoscanning using a piezoactuated bimorph probe

Gunev

Varol

Karaman

et al. 2007

Review of Scientific Instruments

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A new approach, called adaptive Q control, for tapping-mode atomic force microscopy (AFM) is introduced and implemented on a homemade AFM setup utilizing a laser Doppler vibrometer and a piezoactuated bimorph probe. In standard Q control, the effective Q factor of the scanning probe is adjusted prior to the scanning depending on the application. However, there is a trade-off in setting the effective Q factor of an AFM probe. The Q factor is either increased to reduce the tapping forces or decreased to increase the maximum achievable scan speed. Realizing these two benefits simultaneously using standard Q control is not possible. In adaptive Q control, the Q factor of the probe is set to an initial value as in standard Q control, but then modified on the fly during scanning when necessary to achieve this goal. In this article, we present the basic theory behind adaptive Q control, the electronics enabling the online modification of the probe's effective Q factor, and the results of the experiments comparing three different methods: scanning (a) without Q control, (b) with standard Q control, and (c) with adaptive Q control. The results show that the performance of adaptive Q control is superior to the other two methods.

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References

2010

Amplitude Modulation Atomic Force Microscopy

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Decrease of the resonance bandwidth of micromechanical oscillators by phase control of the driving force

Cited by 11 publications

References 13 publications

Mass sensing with resonating ultra-thin silicon beams detected by a double-beam laser Doppler vibrometer

Mass sensing with resonating ultra-thin silicon beams detected by a double-beam laser Doppler vibrometer

Adaptive Q control for tapping-mode nanoscanning using a piezoactuated bimorph probe

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