2024
DOI: 10.1007/s44196-024-00423-w
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Deep Learning-Based Integrated Circuit Surface Defect Detection: Addressing Information Density Imbalance for Industrial Application

Xiaobin Wang,
Shuang Gao,
Jianlan Guo
et al.

Abstract: In this study, we aimed to address the primary challenges encountered in industrial integrated circuit (IC) surface defect detection, particularly focusing on the imbalance in information density arising from difficulties in data sample collection. To this end, we have developed a new hybrid architecture model for IC surface defect detection (SDDM), based on ResNet and Vision Transformer (ViT). The core innovation of SDDM lies in the integration of the concepts of image information density and dataset informat… Show more

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Cited by 2 publications
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