Deep learning potential model of displacement damage in hafnium oxide ferroelectric films
Hua Chen,
Yanjun Zhang,
Chao Zhou
et al.
Abstract:A model for studying displacement damage in irradiated HfO2 ferroelectric thin films was developed using deep learning and a repulsive table, combining the accuracy of density functional theory with the efficiency of molecular dynamics. This model accurately predicts the properties of various HfO2 phases, such as PO (Pca21), T (P42/nmc), AO (Pbca), and M (P21/c), and describes the atom collision-separation process during irradiation. The displacement threshold energies for the Hf atoms, three-coordinated O ato… Show more
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