In aerospace, aviation, nuclear power, and other high-tech fields, some essential moving parts must operate under high vacuum, high load, intense radiation, and other conditions. Under such extreme conditions, only solid lubricating materials can meet the lubrication requirements. Traditional material modification methods have problems such as high energy consumption, severe pollution, and narrow scope of application. Plasma modification technology can overcome these shortcomings. This paper focuses on several commonly used plasma preparation techniques for solid lubricating coatings, including plasma chemical heat treatment, physical vapor deposition, plasma immersion ion implantation and deposition, plasma spraying, and plasma electrolytic oxidation. Subsequently, the material systems of metal-based solid lubrication coatings are reviewed: soft metals, oxides, sulfides, nitrides, and carbon-based materials. Finally, found that the development of new solid lubricants, the improvement of existing preparation technology, and the development of new processes are the key development directions in the future.