Deep-UV microscopy based on a hybrid diffractive/refractive lens system

Brunner, Róbert; Steiner, Reinhard; Rudolf, K; Dobschal, Hans-Jürgen; Fechner, Renate; Schindler, Axel

doi:10.1364/domo.2004.dsuc3

Cited by 1 publication

(3 citation statements)

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“…An additional proportional transfer via techniques such as reactive ion beam etching (RIBE) [2] is not necessary to obtain sufficient diffraction efficiency. This makes the presented tool suitable for the generation of custom-built gratings and a working tool for testing new grating geometries for optical devices.…”

Section: Discussionmentioning

confidence: 99%

“…For example, effort can be applied to linearize the slope of the active blaze facet and create a sharper step on the passive blaze facet. Although a similar sawtooth-like profile could also be manufactured by IL, the profile depth of such an IL structure would be limited to a maximum depth smaller than approximately 200 nm [2,3]. And, therefore, it will either show a very low diffraction efficiency in the visible or near-infrared spectral range or has to be further treated, e.g., by reactive ion-etching processes.…”

Section: A Manufacturing Of Deep Blazed Gratingsmentioning

confidence: 99%

“…In particular, IL allows the creation of blaze-like grooves but depends on the grating period and exposure wavelength; it is limited in profile depth, which is typically in the order of 150 nm [2,3].…”

Section: Introductionmentioning

confidence: 99%

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Flexible mask illumination setup for serial multipatterning in Talbot lithography

et al. 2014

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A flexible illumination system for Talbot lithography is presented, in which the Talbot mask is illuminated by discrete but variable incidence angles. Changing the illumination angle stepwise in combination with different exposure doses for different angles offers the possibility to generate periodic continuous surface relief structures. To demonstrate the capability of this approach, two exemplary micro-optical structures were manufactured. The first example is a blazed grating with a stepsize of 1.5 μm. The second element is a specific beam splitter with parabolic-shaped grating grooves. The quality of the manufacturing process is evaluated on the basis of the optical performance of the resulting micro-optical elements.

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Section: Discussionmentioning

confidence: 99%

Section: A Manufacturing Of Deep Blazed Gratingsmentioning

confidence: 99%