Defect Characterization by Differential Phase Contrast Imaging Technique in Scanning Transmission Electron Microscope

Lin, Ching-Chun; Hsu, Kim

doi:10.1109/ipfa47161.2019.8984823

2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA) 2019

DOI: 10.1109/ipfa47161.2019.8984823

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Defect Characterization by Differential Phase Contrast Imaging Technique in Scanning Transmission Electron Microscope

Ching-Chun Lin

Kim Hsu

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Defect Characterization by Differential Phase Contrast Imaging Technique in Scanning Transmission Electron Microscope

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References 7 publications

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