Defect Characterization of HfTiOx Gate Dielectrics on SiGe Heterolayers Using Inelastic Tunneling Spectroscopy

Maiti, Partha Pratim; Mukherjee, C.; Bag, A.; Mallik, S.; Maiti, C. K.

doi:10.1007/s11664-024-11550-7

J. Electron. Mater.

2024

DOI: 10.1007/s11664-024-11550-7

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Defect Characterization of HfTiOx Gate Dielectrics on SiGe Heterolayers Using Inelastic Tunneling Spectroscopy

Partha Pratim Maiti,

C. Mukherjee,

A. Bag

et al.

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Defect Characterization of HfTiOx Gate Dielectrics on SiGe Heterolayers Using Inelastic Tunneling Spectroscopy

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References 51 publications

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