Defect dynamics in directed self-assembly of block copolymers (Conference Presentation)

Azuma, Tsukasa; Seino, Yuriko; Sato, Hiroki; Kasahara, Yusuke; Kodera, Katsuyoshi; Miyagi, Ken; Shiraishi, Masayuki; Matsuki, Ryota; Kosaka, Terumasa; Himi, Toshiyuki; Nagahara, Seiji; Nakatani, Ryuichi; Hayakawa, Tetsuo; Yoshimoto, Kenji; Omosu, Takuya; Takenaka, Mitsuru

doi:10.1117/12.2297310

Advances in Patterning Materials and Processes XXXV 2018

DOI: 10.1117/12.2297310

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Defect dynamics in directed self-assembly of block copolymers (Conference Presentation)

Tsukasa Azuma¹,

Yuriko Seino²,

Hiroki Sato³

et al.

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Defect dynamics in directed self-assembly of block copolymers (Conference Presentation)

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