On the one hand, key properties such as photoluminescence, [5] carrier mobility, [6] and thermal conductivity, [7] are significantly affected by defects in 2D materials, therefore limiting defects is crucial for controllable, uniform, and scalable synthesis of these materials for their practical applications. On the other hand, defects in 2D materials often result in new electronic states, thereby endowing functionalities that are otherwise not possible in pristine materials. For instance, defects in transition metal dichalcogenides (TMDs) can modulate the charge carrier type, [8] spatially localize excitons for single photon emitters, [9][10][11] and lift spin degeneracy to induce magnetism in non-magnetic 2D materials. [12,13] Furthermore, defects can stabilize the metastable phases during synthesis and processing and even induce structural transitions. [14,15] Therefore, engineering defects offers great opportunities to realize new optoelectronic functionalities and quantum states in 2D materials. Given the importance of defects in 2D materials, control over their concentration and structure has become essential to achieve desired properties and functionalities. For example, depending on the density of defects, nearly dispersionless localized in-gap states or strongly hybridized extended states can be generated to modulate the carrier type and density of the 2D materials for Defects are ubiquitous in 2D materials and can affect the structure and properties of the materials and also introduce new functionalities. Methods to adjust the structure and density of defects during bottom-up synthesis are required to control the growth of 2D materials with tailored optical and electronic properties. Here, the authors present an Au-assisted chemical vapor deposition approach to selectively form S W and S2 W antisite defects, whereby one or two sulfur atoms substitute for a tungsten atom in WS 2 monolayers. Guided by first-principles calculations, they describe a new method that can maintain tungsten-poor growth conditions relative to sulfur via the low solubility of W atoms in a gold/W alloy, thereby significantly reducing the formation energy of the antisite defects during the growth of WS 2 . The atomic structure and composition of the antisite defects are unambiguously identified by Z-contrast scanning transmission electron microscopy and electron energyloss spectroscopy, and their total concentration is statistically determined, with levels up to ≈5.0%. Scanning tunneling microscopy/spectroscopy measurements and first-principles calculations further verified these antisite defects and revealed the localized defect states in the bandgap of WS 2 monolayers. This bottom-up synthesis method to form antisite defects should apply in the synthesis of other 2D materials.