Deformable Carbon Nanotube-Contact Pads for Inertial Microswitch to Extend Contact Time

Lee, Jae Ik; Song, Youngsup; Jung, Hyungil; Choi, Jungwook; Eun, Youngkee; Kim, Jongbaeg

doi:10.1109/tie.2011.2163918

Cited by 45 publications

(37 citation statements)

References 35 publications

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“…By contrast experiment, the conclusion has been proved that the extension of contact time can be achieved by reducing the stiffness of the fixed electrode, especially its thickness. In addition to the method of utilizing flexible structure to extend the contact time as described above, some literature mentioned carbon on nanotubes (CNTs) as electrode contact materials [9,88,89]. CNTs are suitable for use as contact materials due to their excellent mechanical and In another way, during the contact process, the deformation of the flexible electrodes (i.e., the fixed electrode or the movable electrode) can provide a buffer for the collision contact between the electrodes, so as to prolong the contact time.…”

Section: Passive Inertial Switchesmentioning

confidence: 99%

Section: Passive Inertial Switchesmentioning

confidence: 99%

See 1 more Smart Citation

Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

Micromachines

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MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain.

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Section: Passive Inertial Switchesmentioning

confidence: 99%

Section: Passive Inertial Switchesmentioning

confidence: 99%

Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

Micromachines

View full text Add to dashboard Cite

show abstract

“…requires their immobilization on various substrates in a controlled manner either by deposition [13][14][15], transfer [16][17][18][19][20][21] or by direct synthesis [22][23][24] with well-defined structure and geometry. In electrical applications, the contact resistance at the substrate-CNT interface [2,17,25], mechanical robustness and integrity [17,26] as well as charging/discharging behavior of the devices [9][10][11][12] are among the most important parameters to be taken into account.…”

Section: Introductionmentioning

confidence: 99%

Thin micropatterned multi-walled carbon nanotube films for electrodes

Halonen

Mäklin

Rautio

et al. 2013

Chemical Physics Letters

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“…The CNT is considered a suitable material for electromechnical contact. Specifically, CNT-to-CNT contact was investigated to achieve a reliable MEMS switching devices [9,10] and applied to inertial microswitch [11]. Moreover, the CNT has been reported to offer an advantage in terms of high-power handling capability [12].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of an Au–Au/carbon nanotube-composite contacts RF-MEMS switch

Kageyama

Shinozaki

Zhang

et al. 2018

Micro and Nano Syst Lett

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This study aims to propose a new fabrication method for an ohmic contact type RF-MEMS switch with Au-Au/carbon nanotube (CNT)-composite contacts. These contacts are proposed to improve the reliability and the high-power handling capability of the ohmic contact type RF-MEMS switch. During the fabrication, we applied Au/CNT-composite electroplated film to the contact area in the signal line, whereas Au electroplating was used to form contacts under the cantilever of the switch. We investigated the influence of the Ar ion beam etching angle on metal layers formation and optimized the Ar ion beam etching conditions to achieve a more reliable RF-MEMS switch. We designed, fabricated, and evaluated an RF-MEMS switch to demonstrate the feasibility of our new fabrication method. We successfully fabricated an Au-Au/CNT-composite contact RF-MEMS switch; it exhibited a low insertion loss of less than 0.7 dB at frequency up to 40 GHz and a cycle life 2.7 times longer than that of an Au-Au contact switch.

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Deformable Carbon Nanotube-Contact Pads for Inertial Microswitch to Extend Contact Time

Cited by 45 publications

References 35 publications

Research Status and Development Trend of MEMS Switches: A Review

Research Status and Development Trend of MEMS Switches: A Review

Thin micropatterned multi-walled carbon nanotube films for electrodes

Fabrication of an Au–Au/carbon nanotube-composite contacts RF-MEMS switch

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