Deformable Micromirror Devices As Phase Modulating High Resolution Light Valves

Heinz, Kuehn; Doleschal, Wolfgang; Gehner, Andreas; Geundke, W.; Melcher, R.; Paufler, J.; Seltmann, Rolf; Zimmer, G.

doi:10.1109/sensor.1995.717178

Cited by 13 publications

(10 citation statements)

References 8 publications

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“…Also acoustooptical modulators [75,76], which shape the optical electric field by diffracting it on a modulated acoustic wave, can be used for this purpose [77], albeit with a low diffraction efficiency and hence low throughput. Micro mirror arrays [78], which consist of individually addressable small mirrors, have also been introduced for this purpose [79]. While these devices are probably the most efficient solution to the problem, they were not commercially available until recently, and could therefore not be employed in the experiments presented here.…”

Section: Frequency Doubling Of Shaped Laser Pulsesmentioning

confidence: 99%

Modeling of light-matter interactions with neural networks

et al. 2007

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With the invention of the laser, the chemists' dream to investigate, initiate and control chemical reactions on the molecular scale seemed to come within grasp. However, the true beginnings of the realization of this dream had to wait until the time when the boundaries on the duration of laser pulses were pushed into the picosecond to femtosecond regime, the natural timescale of nuclear motions, i.e., vibrations and rotations in molecules. While such light sources allowed, for the first time, the direct observation of molecular dynamics, the breakthrough for the control of physical or chemical processes on the atomic or molecular scale came with the advent of pulse shaping techniques that made it possible to modify these ultrashort pulses, and hence to adapt them to the involved dynamics.

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Section: Frequency Doubling Of Shaped Laser Pulsesmentioning

confidence: 99%

Modeling of light-matter interactions with neural networks

et al. 2007

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“…Two of our products will serve as examples to substantiate several statements. This is the micro scanning mirror for laser beam deflection [2,3] and the micromirror array [4,5] for fast optical pattern generation with high resolution (see figure 1).…”

Section: Examplesmentioning

confidence: 99%

Designing MEMS for manufacturing

Wolter

Herrmann

Yildiz

et al. 2004

Optomechatronic Micro/Nano Components, Devices, and Systems

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MEMS (micro electro-mechanical systems) are often expected to take a development as microelectronics did in the last 35 years. Several devices are already established in mass markets like acceleration sensors, gyros, pressure sensors, ink jet heads and the DLP micromirror array. On the other hand many companies have stopped their business after the telecom bubble. Others are struggling. Many dreams based on MEMS-devices that were not at all mature and could not be manufactured in high numbers. When a commercial product is the goal, several questions must be answered already in concept phase. The specifications must clearly reflect the requirements of the application. Performance and price must be competitive to any other technology. The relation between fabrication process and design is strong and mutual. The process must create all features of the devMEMS (micro electro-mechanical systems) are often expected to take a development as microelectronics did in the last 35 years. Several devices are already established in mass markets like acceleration sensors, gyros, pressure sensors, ink jet heads and the DLP micromirror array. On the other hand many companies have stopped their business after the telecom bubble. Others are struggling. Many dreams based on MEMS-devices that were not at all mature and could not be manufactured in high numbers. When a commercial product is the goal, several questions must be answered already in concept phase. The specifications must clearly reflect the requirements of the application. Performance and price must be competitive to any other technology. The relation between fabrication process and design is strong and mutual. The process must create all features of the device and the design must consider the limitations of the process. Only if the design is tolerant against all process variations reproducible performance can be achieved. And only if the design is robust in all process steps the devices can survive. Regarding the time and cost frame it is always preferable to change the layout rather than the process. This article looks at MEMS technology and identifies what has been adopted from CMOS, what is desirable to adopt and what needs new solutions. Examples are given in the fields of design, modeling layout, process, test, and packaging. Keywords: micro scanning mirror, micromirror array, optical MEMS, MOEMS, laser beam deflection, micromachining, out-of-plane comb drive, microsystem ice and the design must consider the limitations of the process. Only if the design is tolerant against all process variations reproducible performance can be achieved. And only if the design is robust in all process steps the devices can survive. Regarding the time and cost frame it is always preferable to change the layout rather than the process. This article looks at MEMS technology and identifies what has been adopted from CMOS, what is desirable to adopt and what needs new solutions. Examples are given in the fields of design, modeling layout, process, test, and packaging

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“…In the early design phase, six decisions that were essential for system capability and capacity were made. The visco-elastic SLM used by Kück [4] was limited in several respects and a micro-mirror SLM is needed to achieve sufficient switching speed [5]. In addition, the SLM requires analog pixel modulation to provide the fine addressing required to meet CD and placement.…”

Section: System Design Overviewmentioning

confidence: 99%

“…This programmable mask is a micro-mirror spatial light modulator (SLM). It has been developed in cooperation with the Fraunhofer Institute in Dresden, Germany, who pioneered the technology for image formation with a visco-elastic SLM [4]. Being a reflective technique and scalable in principle, it has the potential to address pattern generation at several shorter wavelengths, such as 193 nm, 157 nm, and 13 nm to meet the needs of future technology nodes.…”

Section: Introductionmentioning

confidence: 99%

Pattern generation with SLM imaging

Sandstrom

Askebjer

Sallander

et al. 2002

21st Annual BACUS Symposium on Photomask Technology

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Pattern generation founded on micro-mirror spatial light modulator (SLM) imaging presents a way to manage the decreasing feature sizes and increasing pattern complexities dictated by Moore's law. This paper identifies the critical elements of the imaging in the implementation of such a pattern generator. We show how the laser illumination, SLM chip, and optics collectively generate the image, and in particular, that these elements can be manufactured and integrated to specification. Expected deficiencies and variations in image quality are then effectively countered with calibration routines that bring final performance to within lithographic requirements, while also being manageable in design and turn-around-times.

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Deformable Micromirror Devices As Phase Modulating High Resolution Light Valves

Cited by 13 publications

References 8 publications

Modeling of light-matter interactions with neural networks

Modeling of light-matter interactions with neural networks

Designing MEMS for manufacturing

Pattern generation with SLM imaging

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