2003
DOI: 10.1088/0957-0233/14/7/303
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Deformation measurement of MEMS components using optical interferometry

Abstract: Current trends in miniaturization of microelectromechanical systems (MEMS) require the use of smaller and smaller components. Development of these microcomponents, e.g. microbeams in an accelerometer and membranes in a microphone, requires state-of-the-art test and measurement methodologies to inspect the deformation of the microcomponents for further understanding of their mechanical properties. In this paper we describe a system developed for testing deformation of a microbeam in an accelerometer under point… Show more

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Cited by 20 publications
(15 citation statements)
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“…(4) and (5) show that one is capable of quantitatively measuring the continual displacement simply using a conventional ESPI system or a double-beam interferometer setup without phase shifting or a carrier.…”
Section: Description Of the Test Methodologymentioning
confidence: 99%
“…(4) and (5) show that one is capable of quantitatively measuring the continual displacement simply using a conventional ESPI system or a double-beam interferometer setup without phase shifting or a carrier.…”
Section: Description Of the Test Methodologymentioning
confidence: 99%
“…Wang et al [4,5] applied optical interferometry technique to measure the deflection of the MEMS cantilever in an accelerometer. The fringes were formed by the interference of light reflecting from the lower surface of an optical flat and that reflecting from the surface of the specimen.…”
Section: Introductionmentioning
confidence: 99%
“…Several optical methods have been developed for surface contouring. In recent years, phaseshifted fringe projection method has become a predominant method of surface contouring, and has been extended to measurement of micro-components such as MEMS components [6][7][8].…”
Section: Introductionmentioning
confidence: 99%