2017
DOI: 10.1016/j.jmst.2016.11.025
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Deformation Strength of Nanocrystalline Thin Films

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Cited by 5 publications
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“…It is known that the mechanical properties of thin films are different from those of bulk materials. This is due to the fact that those properties are dependent on the dimensions and the fabrication process of the material [4][5][6][7]. Therefore, it is essential to carry out experiments to obtain the mechanical properties of thin films such as microelectro-mechanical system (MEMS) materials used in micromechanical structures, and flexible printed circuit board…”
Section: Introductionmentioning
confidence: 99%
“…It is known that the mechanical properties of thin films are different from those of bulk materials. This is due to the fact that those properties are dependent on the dimensions and the fabrication process of the material [4][5][6][7]. Therefore, it is essential to carry out experiments to obtain the mechanical properties of thin films such as microelectro-mechanical system (MEMS) materials used in micromechanical structures, and flexible printed circuit board…”
Section: Introductionmentioning
confidence: 99%