Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy

Chao, Weilun; Kim, Jihoon; Rekawa, Senajith; Fischer, Peter; Anderson, Erik H.

doi:10.1364/oe.17.017669

Cited by 276 publications

(165 citation statements)

References 27 publications

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“…Large synchrotron facilities were also extensively utilized for the implementation of full field microscopes with record spatial resolution of 12 [17] or 14 nm utilizing k = 1.38 nm undulator radiation and third order zone plate diffraction [18], also including magnetic material imaging [19][20][21][22]. Soft X-ray (SXR) microscopy has been successfully employed mainly in transmission mode, either using diffractive optics, such as zone-plates [23][24][25], raster scanning of the sample by focused SXR beam [26][27][28] or as a contact microscopy, where the sample is placed on top of a recording medium, such as a photoresist, and illuminated by SXR beam to make a ''picture'' of the specimen in the surface of the recording medium [29][30][31].…”

Section: Introductionmentioning

confidence: 99%

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

et al. 2013

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We report on a compact, desktop size, laboratory type microscopy setup, based on a short wavelength gas puff target soft X-ray source, which emits incoherent radiation in ''water-window'' spectral range. The microscope employs a Wolter type I reflective objective and allows capturing magnified images of objects with *1-lm spatial resolution and exposure time as low as 5 s. A detailed characterization and optimization of both the source and the microscope setups are presented and discussed.

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Section: Introductionmentioning

confidence: 99%

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

et al. 2013

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“…Fresnel zone plates (FZPs) (Falcone et al, 2011) provided the highest two-dimensional resolutions for soft X-rays (Chao et al, 2005(Chao et al, , 2009Vila-Comamala et al, 2009). Their resolution at the first-order focus is determined by the width of the outermost zone, Ár n , via the relation r Rayleigh = 1.22 Ár n , where r Rayleigh is the Rayleigh resolution (Attwood, 2000).…”

Section: Introductionmentioning

confidence: 99%

Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling

Mayer

Keskinbora

Grévent

et al. 2013

J Synchrotron Radiat

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Fresnel zone plates (FZPs) recently showed significant improvement by focusing soft X-rays down to ∼10 nm. In contrast to soft X-rays, generally a very high aspect ratio FZP is needed for efficient focusing of hard X-rays. Therefore, FZPs had limited success in the hard X-ray range owing to difficulties of manufacturing high-aspect-ratio zone plates using conventional techniques. Here, employing a method of fabrication based on atomic layer deposition (ALD) and focused ion beam (FIB) milling, FZPs with very high aspect ratios were prepared. Such multilayer FZPs with outermost zone widths of 10 and 35 nm and aspect ratios of up to 243 were tested for their focusing properties at 8 keV and shown to focus hard X-rays efficiently. This success was enabled by the outstanding layer quality thanks to ALD.Viathe use of FIB for slicing the multilayer structures, desired aspect ratios could be obtained by precisely controlling the thickness. Experimental diffraction efficiencies of multilayer FZPs fabricatedviathis combination reached up to 15.58% at 8 keV. In addition, scanning transmission X-ray microscopy experiments at 1.5 keV were carried out using one of the multilayer FZPs and resolved a 60 nm feature size. Finally, the prospective of different material combinations with various outermost zone widths at 8 and 17 keV is discussed in the light of the coupled wave theory and the thin-grating approximation. Al2O3/Ir is outlined as a promising future material candidate for extremely high resolution with a theoretical efficiency of more than 20% for as small an outermost zone width as 10 nm at 17 keV.

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“…The large field of view (B8 mm) at XM-1 allowed accumulating high statistical accuracy by repeated measurements of 25 disks out of total 900 disks. The optical setup for XM-1 is described elsewhere 44 . It consists of two Fresnel zone plates used as condenser and objective lens, which allows to record real space images with high lateral resolution down to currently 25 nm.…”

Section: Methodsmentioning

confidence: 99%

Stochastic formation of magnetic vortex structures in asymmetric disks triggered by chaotic dynamics

Lee

Vogel

et al. 2014

Nat Commun

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The non-trivial spin configuration in a magnetic vortex is a prototype for fundamental studies of nanoscale spin behaviour with potential applications in magnetic information technologies. Arrays of magnetic vortices interfacing with perpendicular thin films have recently been proposed as enabler for skyrmionic structures at room temperature, which has opened exciting perspectives on practical applications of skyrmions. An important milestone for achieving not only such skyrmion materials but also general applications of magnetic vortices is a reliable control of vortex structures. However, controlling magnetic processes is hampered by stochastic behaviour, which is associated with thermal fluctuations in general. Here we show that the dynamics in the initial stages of vortex formation on an ultrafast timescale plays a dominating role for the stochastic behaviour observed at steady state. Our results show that the intrinsic stochastic nature of vortex creation can be controlled by adjusting the interdisk distance in asymmetric disk arrays.

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Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy

Cited by 276 publications

References 27 publications

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling

Stochastic formation of magnetic vortex structures in asymmetric disks triggered by chaotic dynamics

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