“…Polymer photonics is an important branch in modern integrated optics. It is compatible with Si and GaAs fabrication technologies [1], and provides a good platform for integrating various active and passive devices, including polymer DBF lasers [2], optical bus waveguides [3], optical switches [4,5], optical modulators [6][7][8], etc. The most common method for polymer optical device fabrication includes using high energy reactive ion-beam (RIE) to define the pattern into a resist, and further transfer the pattern to the optical polymer via plasma etching.…”