We demonstrate an ultrahigh-Q slotted two-dimensional photonic crystal cavity capable of obtaining strong interaction between the internal light field and the mechanical motion of the slotted structure. The measured optical quality factor is Q = 1.2ϫ 10 6 for a cavity with an effective modal volume of V eff = 0.04͑ ͒ 3 . Optical transduction of the thermal motion of the fundamental in-plane mechanical resonance of the structure ͑ m = 151 MHz͒ is performed, from which a zero-point motion optomechanical coupling rate of g ء / 2 = 320 kHz is inferred. Dynamical back-action of the optical field on the mechanical motion, resulting in cooling and amplication of the mechanical motion, is also demonstrated. © 2010 American Institute of Physics. ͓doi:10.1063/1.3507288͔The strength of the interaction between light and matter, which is fundamental to many applications in nonlinear and quantum optics, depends on the ability to create a large optical energy density, either through increased photon number or photon localization. This may be achieved by creating optical cavities with large quality factors Q and simultaneously small modal volumes V eff . The mode volume V eff in particular can be decreased through the introduction of slots, increasing the electric field intensity in low-index regions of the device. As such, slotted photonic crystal cavities 1 and waveguides 2 have been previously proposed and applied to create highly sensitive detectors of motion 3,4 and molecules. 5 They have also more recently been studied in the context of Purcell enhancement of spontaneous emission from embedded quantum dots. 6 In the canonical optomechanical system, consisting of a Fabry-Perot resonator with an oscillating end-mirror, 7 the radiation pressure force per cavity photon is given by បgwhere o is the cavity resonance frequency, x is the position of the end mirror, and L OM is approximately equal to the physical length of the cavity. In the quantum realm, one is interested in the zero-point motion coupling rate, which is given by g = g OM ͱ ប / 2m eff m , where m eff is the effective motional mass and m is the mechanical resonance frequency. Large optomechanical coupling, approaching g OM = o / , has recently been realized in several different guided wave optical cavity geometries utilizing nanoscale slots. 3,4,8 In this work we design, fabricate, and measure the optomechanical properties of a slotted twodimensional ͑2D͒ photonic crystal cavity formed in a Silicon membrane. Due to the strong optical confinement provided by a sub-100 nm slot and a 2D photonic band gap, this cavity structure is demonstrated to have an optical quality factor Q Ͼ 10 6 and a coupling rate of g / 2 = 320 kHz.A common approach to forming photonic crystal optical circuits is to etch a pattern of holes into a thin dielectric film such as the top Silicon device layer in a Silicon-On-Insulator ͑SOI͒ microchip. An effective means of forming resonant cavities in such quasi-2D slab photonic crystal structures is to weakly modulate the properties of a line-de...