1997
DOI: 10.1063/1.119822
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Demonstration of an imide coupling reaction on a Si(100)-2×1 surface by molecular layer deposition

Abstract: In this letter, we report the successful growth of an ultrathin organic film on Si(100)-2×1 by reactive coupling of polyimide precursors. Using the molecular layer deposition technique, 1,4-phenylene diamine and pyromellitic dianhydride were sequentially dosed on clean Si(100)-2×1 under ultrahigh vacuum conditions. The interfacial imidization was initiated by thermal curing at 200 °C. High resolution electron energy loss spectroscopy was employed to identify surface species. The spectra show clearly, that an o… Show more

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Cited by 50 publications
(48 citation statements)
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“…4.3, provides the pathway for continuous building into the third dimension, as illustrated in Fig. 4.4 [107]. This complex approach is deeply routed in the atomiclayer deposition procedures; however, in these examples, substantially complex molecules play the role of building blocks in self-limiting surface reactions.…”
Section: First Attempts To Move Into the Third Dimensionmentioning
confidence: 98%
See 1 more Smart Citation
“…4.3, provides the pathway for continuous building into the third dimension, as illustrated in Fig. 4.4 [107]. This complex approach is deeply routed in the atomiclayer deposition procedures; however, in these examples, substantially complex molecules play the role of building blocks in self-limiting surface reactions.…”
Section: First Attempts To Move Into the Third Dimensionmentioning
confidence: 98%
“…The bottom-up approaches based on the imide coupling reaction have been offered by Bitzer and Richardson [107,467,468]. Surface attachment of the 1,4-phenylene diamine followed by imide coupling with the pyromellitic dianhydride, as shown in Fig.…”
Section: First Attempts To Move Into the Third Dimensionmentioning
confidence: 99%
“…Despite their potential high technological impact, surface supported covalently bonded networks have attracted increasing attention only recently. These covalent systems include polycondensation reactions of imides [15,16] and imines [17,18], periodically corrugated monolayers of boron nitride [19][20][21][22] and graphene [23,24], networks based on boronate chemistry [25], and, recently, the first example of a two-dimensional surface supported porphyrin network with domain sizes of ~10 nm [14]. The characteristic or repeat dimensions of these molecular networks are typically in the range 5 to 20 nm, at a length scale where conventional lithographic techniques are no longer applicable.…”
Section: Introductionmentioning
confidence: 98%
“…A strategy to overcome this low stabilization energy relies on inducing covalent reactions between the molecular components, thus forming twodimensional covalently bonded networks. The formation of covalent bonds between complementary molecular components is an appealing approach in the fabrication of nanoscale structures, such as nanomeshes and nanolines, because of their high selectivity, strength, and directionality [3,[14][15][16][17][18][19][20][21][22][23][24][25][26]. These nanostructures are attractive for their intrinsic properties; for their potential applications such as in novel sensing, energy conversion or catalytic devices; for their ability to "trap" other molecules such as fullerenes, creating even more interesting complexes and for their use as templates to direct the growth of, for example, metal clusters with interesting catalytic or magnetic properties [26,27].…”
Section: Introductionmentioning
confidence: 99%
“…Recent studies of the interactions of unsaturated hydrocarbons with Si(100) have exploited many promising opportunities for the development of atomically well-defined and ordered surface functionalities that form the basis of molecular devices and nanoelectronics as well as biotechnology. 3,14,15 Aromatic hydrocarbons (e.g., benzene) and chainlike alkenes (e.g., ethylene) are the basic building blocks for constructing "conjugated" structures in most conducting polymer materials. 8,9 Styrene (or vinylbenzene) therefore represents one of the most fundamental combinations of a hexacyclic aromatic unit (the phenyl group) with the smallest alkene (the vinyl group).…”
Section: Introductionmentioning
confidence: 99%