2021
DOI: 10.1021/acsphotonics.1c00973
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Demonstration of Hybrid High-Q Hexagonal Boron Nitride Microresonators

Abstract: Hexagonal boron nitride (hBN) is a wide bandgap van der Waals material that is emerging as a powerful platform for quantum optics and nanophotonics. In this work, we demonstrate whispering gallery mode silica microresonators hybridized with thin layers of hBN that exhibit high intrinsic optical quality factor >7 × 10 5 and a linear absorption coefficient of 9.5 cm −1 . Measurements of the effect of hBN thickness on optical Q and comparison with a theoretical model allows the linear optical absorption coefficie… Show more

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Cited by 10 publications
(5 citation statements)
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“…In addition, advanced scalable vdW epitaxy techniques for novel 2D multilayer heterostructures are still required for scalable wafer-level uniformity and high-quality commercial applications. Recently, it was proven feasible to grow hBN layers with controllable thickness on SiO 2 microdisk cavities [209,210]. However, it is necessary to overcome the difficulties in direct growth of 2D materials on 3D irregular NOEMS, including NEM and NOM resonators, nanophotonic cavities, quantum emitters, optoelectronic devices, etc.…”
Section: ) Controllable Large-scale Preparation Of 2d Materials and N...mentioning
confidence: 99%
“…In addition, advanced scalable vdW epitaxy techniques for novel 2D multilayer heterostructures are still required for scalable wafer-level uniformity and high-quality commercial applications. Recently, it was proven feasible to grow hBN layers with controllable thickness on SiO 2 microdisk cavities [209,210]. However, it is necessary to overcome the difficulties in direct growth of 2D materials on 3D irregular NOEMS, including NEM and NOM resonators, nanophotonic cavities, quantum emitters, optoelectronic devices, etc.…”
Section: ) Controllable Large-scale Preparation Of 2d Materials and N...mentioning
confidence: 99%
“…Growing uniform thin h‐BN‐films via chemical vapor deposition on SiO 2 microdisk cavities enables whispering gallery modes in the hybrid h‐BN‐SiO 2 microdisk with Q‐factors larger 7.6 × 10 5 . [ 108 ] Furthermore, hybrid devices based on van der Waals heterostructures involving h‐BN have been realized. Microdisk cavities fabricated from stacked h‐BN/WS 2 /h‐BN reached an enhanced emission intensity of the WS 2 trion by 2.9 times with a nonlinear power dependence when coupled to the whispering gallery modes.…”
Section: Quantum Photonics and Plasmonicsmentioning
confidence: 99%
“…In addition, the undercut techniques used for suspension structure construction and bulk angle etching processes have not been successfully applied to BN [ 5 ]. Recently, researchers have studied the hBN photonic crystal microcavity [ 6 ] and the composite optical microcavity of hBN and SiO 2 [ 7 ], but there is still a research gap in the pure BN microdisk and microring optical microcavity with suspended structure. Management of single-mode laser and nanoscale sensing by optical microcavities in UV has been a great challenge in micro ultraviolet laser and high-sensitivity nano detection.…”
Section: Introductionmentioning
confidence: 99%