Demonstration of polarization-independent resonant subwavelength grating filter arrays

Peters, David W.; Boye, Robert R.; Wendt, Joel R.; Kellogg, Rick A.; Kemme, Shanalyn A.; Carter, Tony R.; Samora, S.

doi:10.1364/ol.35.003201

Cited by 63 publications

(34 citation statements)

References 12 publications

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“…Theoretically, the reflectivity for plane wave incidence is as high as 100% at the wavelength and angle of incidence where all of the radiated waves interfere constructively [15]. Thin-film gratings are therefore often called Resonant Gratings (RG) or Resonant Sub-wavelength Gratings (RSG) [16,17]. A RG functions basically as a wavelength selective mirror, and its reflection spectrum can be tailored by designing the periodic structure appropriately [18].…”

Section: Open Accessmentioning

confidence: 99%

Cylindrical Resonator Utilizing a Curved Resonant Grating as a Cavity Wall

2012

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A thin-film grating on a curved substrate functions as a highly reflective and wavelength sensitive mirror for a diverging wave that has the same curvature as the substrate. In this paper we propose a cylindrical cavity surrounded by a curved resonant grating wall, and describe its resonance characteristics. Through finite-difference time-domain (FDTD) simulation we have clarified that this type of cavity supports two resonance modes: one is confined by Fresnel reflection and the other by resonance reflection of the wall. We have also demonstrated that the latter mode exhibits a Q factor several orders of magnitude higher than that of the former mode.

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Section: Open Accessmentioning

confidence: 99%

Cylindrical Resonator Utilizing a Curved Resonant Grating as a Cavity Wall

2012

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“…7 The analysis and design of the two dimensional RSGs was done using rigorous coupled wave analysis (RCWA). [8][9][10] The geometry of the grating is shown in Figure 3.…”

Section: Original Design With Titanium Dioxidementioning

confidence: 99%

High precision fabrication of polarization insensitive resonant subwavelength gratings

Boye¹,

Peters²,

Wendt³

et al. 2012

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V

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Resonant subwavelength gratings have been designed and fabricated as wavelength-specific reflectors for application as a rotary position encoder utilizing ebeam based photolithography. The first grating design used a two-dimensional layout to provide polarization insensitivity with separate layers for the grating and waveguide. The resulting devices had excellent pattern fidelity and the resonance peaks and widths closely matched the expected results. Unfortunately, the gratings were particularly angle sensitive and etch depth errors led to shifts in the center wavelength of the resonances. A second design iteration resulted in a double grating period to reduce the angle sensitivity as well as different materials and geometry; the grating and waveguide being the same layer. The inclusion of etch stop layers provided more accurate etch depths; however, the tolerance to changes in the grating duty cycle was much tighter. Results from these devices show the effects of small errors in the pattern fidelity. The fabrication process flows for both iterations of devices will be reviewed as well as the performance of the fabricated devices. A discussion of the relative merits of the various design choices provides insight into the importance of fabrication considerations during the design stage.

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“…Therefore, polarization‐insensitive properties of GMRFs are required. Although polarization‐insensitivity is the nature of two‐dimensional (2D) GMRFs due to their symmetry profiles, there is a strong angular dependence of the resonance wavelength on the incident angle. For a 2D GMRF, slightly offnormal illumination leads to two narrow sidebands and a spectral shift.…”

Section: Introductionmentioning

confidence: 99%

“…Although polarization‐insensitivity is the nature of two‐dimensional (2D) GMRFs due to their symmetry profiles, there is a strong angular dependence of the resonance wavelength on the incident angle. For a 2D GMRF, slightly offnormal illumination leads to two narrow sidebands and a spectral shift. Moreover, due to the difficult control of grating depths of the 2D GMRFs, the measured nonpolarizing spectra are not satisfactory.…”

Section: Introductionmentioning

confidence: 99%

Mounting‐insensitive nonpolarizing guided‐mode resonance filters for optical communications

Ren

Sun

Zhang

et al. 2018

Micro & Optical Tech Letters

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Mounting‐insensitive nonpolarizing guided‐mode resonance filters (GMRFs) for the optical communication wavelength O‐band and C‐band have been designed and fabricated. The rigorous coupled‐wave analysis (RCWA) is used to calculate the reflection spectra of the designed GMRFs. The grating structures of the GMRFs are patterned by interference lithography with two ultraviolet laser beams. The reflection spectra of the fabricated samples at different incident angles are measured by rotating a motorized stage. Compared with previous reported one‐dimensional nonpolarizing GMRFs, the tolerances of conical angle of the fabricated samples are remarkably improved.

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Demonstration of polarization-independent resonant subwavelength grating filter arrays

Cited by 63 publications

References 12 publications

Cylindrical Resonator Utilizing a Curved Resonant Grating as a Cavity Wall

Cylindrical Resonator Utilizing a Curved Resonant Grating as a Cavity Wall

High precision fabrication of polarization insensitive resonant subwavelength gratings

Mounting‐insensitive nonpolarizing guided‐mode resonance filters for optical communications

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