Integrated Optics: Devices, Materials, and Technologies XXVI 2022
DOI: 10.1117/12.2605816
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Dense silicon-nitride PIC design and manufacturing on transparent substrate for a retinal projector evaluation

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Cited by 7 publications
(4 citation statements)
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“…We estimate propagation losses using Payne and Lacey's formalism 21 with a Line Edge Roughness (LER) of 4.8 nm. We obtain this experimental data out of a sidewall roughness measurement performed on a previous generation of SiN photonics circuits designed for the same wavelength 22 . Propagation losses are expressed in 𝑚 −1 by…”
Section: Performance Estimationmentioning
confidence: 99%
“…We estimate propagation losses using Payne and Lacey's formalism 21 with a Line Edge Roughness (LER) of 4.8 nm. We obtain this experimental data out of a sidewall roughness measurement performed on a previous generation of SiN photonics circuits designed for the same wavelength 22 . Propagation losses are expressed in 𝑚 −1 by…”
Section: Performance Estimationmentioning
confidence: 99%
“…The measurement of active light extraction in our transparent sample shown in Figure 8 is complex due to parasitic reflections and propagation losses in our Si2N3 waveguides 8 . The useful signal from the extraction quickly becomes noisy.…”
Section: Structurementioning
confidence: 99%
“…They allow the division of the input signal from the laser, into a multitude of waveguides densely distributed at the surface of the glass. The manufacturing process of the waveguide was introduced recently 12 and we present in PW23 our very latest results concerning the conception of advanced routing architectures, used for addressing dense random distributions of waveguides 13 As described in Figure 2(b), a switchable out-coupler grating extracts the light guided in the SiN waveguide at a specific location given by the intersection of a waveguide and an electrode. To achieve this, we use a grating impregnated with a Liquid Crystal.…”
Section: Pixelated Holographic Displaymentioning
confidence: 99%