Densification modeling of fused silica under nanoindentation

Gadelrab, Karim; Bonilla, F.A.; Chiesa, Matteo

doi:10.1016/j.jnoncrysol.2011.10.011

Cited by 61 publications

(42 citation statements)

References 37 publications

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“…The hardening effect induced by imposed strain in amorphous/glassy materials has been previously reported [28][29][30]. Different from strain hardening in metallic materials, plastic deformation could lead to the densification of this amorphous PECVD silicon nitride [19,31,32] (as it is not fully dense) through clustering of vacancies, swapping and reordering of atoms.…”

Section: Accepted M Manuscriptmentioning

confidence: 87%

Interfacial energy release rates of SiN/GaAs film/substrate systems determined using a cyclic loading dual-indentation method

Huang

2015

Thin Solid Films

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Please cite this article as: Mingyuan Lu, Han Huang, Interfacial energy release rates of SiN/GaAs film/substrate systems determined using a cyclic loading dual-indentation method, Thin Solid Films (2015Films ( ), doi: 10.1016Films ( /j.tsf.2015 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. A C C E P T E D M A N U S C R I P T ACCEPTED MANUSCRIPT AbstractOur previous study developed a dual-indentation method for testing the interfacial energy release rate, G in , of the SiN/GaAs film/substrate systems. However, for the film/substrate systems with relatively high interfacial toughness, the dual-indentation method was unable to generate interfacial delamination. In this study, a cyclic loading dual-indentation method was proposed, in which the first monotonic loading in the dual-indentation method was replaced by cyclic loading. It was demonstrated that cyclic loading was effective at inducing delamination in relatively "tough" SiN/GaAs interfaces that were unable to be delaminated by dual-indentation method. The G in values obtained from the cyclic loading indentation were in good agreement with those obtained from the dual-indentation method for the less tough interfaces. The delamination mechanism in the cyclic loading indentation was attributed to the hardening effect on the films induced by cyclic loading, permitting sufficient elastic strain energy to be accumulated to initiate the delamination.Key words: Nanoindentation; delamination; cyclic loading; energy release rate A C C E P T E D M A N U S C R I P T ACCEPTED MANUSCRIPT IntroductionThe assessment of the adhesion properties of a thin film is imperative to ensure the reliability of the film/substrate system over its life cycles [1]. As a consequence, there is an increasing demand for developing reliable techniques to measure the interfacial adhesion between a film and a substrate. In the past few decades, significant research effort has been directed towards developing approaches to evaluate the adhesion property [1][2][3][4][5][6][7]. Among the available techniques, indentation enables the investigation of interfacial adhesion of a film/substrate system to be undertaken in a controllable manner by generating interfacial cracks on a sufficiently small scale and at a specific site [8].In our previous work, a dual-indentation method was developed to assess the interfacial adhesion of SiN/GaAs film/substrate systems [9]. This method was successfully applied to the SiN/GaAs film/substrate systems with different interfacial properties. The limitation of the dual-indentation approach was that interfacial delamination must be induced during the first ...

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Section: Accepted M Manuscriptmentioning

confidence: 87%

Interfacial energy release rates of SiN/GaAs film/substrate systems determined using a cyclic loading dual-indentation method

Huang

2015

Thin Solid Films

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“…This implies that although the unloading is not fully elastic, the plastic properties have minor influence on the unloading force curve. In fact, in a previous study [27], we have compared the two plasticity models and found that the difference between the force plots obtained was at the lowest portion of the unloading curve where the tip is losing contact with the material. It was found that the difference in the shape of the remaining indent was the reason behind such discrepancy meaning that the plastic properties of the material affects the unloading curve at its lowest portion by influencing the shape of the remaining indent [27].…”

Section: Effect Of Plasticity On the Unloading Force Curvementioning

confidence: 95%

“…A stiff material with Young's modulus of E o ¼180 GPa and yield strength of 1 GPa resembles the properties of steel. A highly elastic material with Young's modulus E o ¼70 GPa and yield strength of 6 GPa is simulated to represent the properties of glass [27]. The last properties set of E o ¼ 4 GPa [28] and yield strength of 200 MPa is employed to simulate the properties of polyemers.…”

Section: Theoretical Backgroundmentioning

confidence: 99%

“…Different values of the yield strength are used in Drucker-Prager model while keeping Young's modulus at 71 GPa and the onset of densification at 11.5 GPa [38]. These values were found to best fit force indentation curves of fused silica [27]. The values of the used yield strength and corresponding m value of the fitting function are shown in Fig.…”

Section: Effect Of Plasticity On the Unloading Force Curvementioning

confidence: 99%

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Numerically assisted nanoindentation analysis

Gadelrab¹,

Chiesa

2013

Materials Science and Engineering: A

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“…It is well known that the contact area (which is used for a determination of effective radius) depends on the actual indenter shape and the material deformation characteristics. 14 The effects of pile-up or sink-in can introduce the error in the determination of contact area by as much as 60 %. 15 The effective radii measured by indentations on investigated samples are lower than the radii from the AFM.…”

Section: Indentationmentioning

confidence: 99%

Characterization of structural materials by spherical indentation

Čech¹,

Haušild²,

Kovářík³

2017

Mater. Tehnol.

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Nano-indentation with spherical indenters is a method of mechanical properties characterization that could be used for the determination of stress-strain curves. A necessary condition for an evaluation of the results is an exact knowledge of the indenter shape. In this study, the shapes of two spherical indenters with a nominal radius of 20 μm were investigated by atomic force microscopy and by indentation into materials with a known Young´s modulus. It was found that the actual indenter differs from the ideal shape and it is affected by the crystallographic orientation of the diamond crystal. The effective radius determined from the indentation measurements depends on the material deformation characteristics and it was lower than the actual radius. The computed representative stress vs. representative strain curves of steel samples were significantly affected by the actual radii of the investigated indenters. Keywords: nano-indentation, spherical indenter, actual indenter shape, representative stress, representative strain curves Nanoindentacija s sferi~nimi vtiskovalci je metoda karakterizacije mehanskih lastnosti, ki se lahko uporablja za ugotovitev napetostno-deformacijske krivulje. Pogoj za oceno rezultatov je to~no dolo~eno poznavanje stanja vtiskovalca. V {tudiji sta bili raziskovana dva sferi~na vtiskovalca z nominalnim radijem 20 ìm, ki sta bila raziskovana z AFM in z vtiskovanjem v material z Youngovim modulom. Ugotovljeno je bilo, da se doti~ni vtiskovalec razlikuje od idealne oblike in, da nanj vpliva kristalografska orientacija diamantnega kristala. Efektivni radij, ugotovljen z meritvami vtiskovanja je odvisen od deformacije karakteristik materiala in je bil ni`ji od dejanskega radija. Izra~unane reprezentativne napetostne krivulje jeklenih vzorcev so bile ob~utno pod vplivom dejanskih radijev preiskovanih vtiskovalcev.

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Densification modeling of fused silica under nanoindentation

Cited by 61 publications

References 37 publications

Interfacial energy release rates of SiN/GaAs film/substrate systems determined using a cyclic loading dual-indentation method

Interfacial energy release rates of SiN/GaAs film/substrate systems determined using a cyclic loading dual-indentation method

Numerically assisted nanoindentation analysis

Characterization of structural materials by spherical indentation

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