Density and Young's modulus of thin TiO 2 films

Thermal properties of TiO2films fabricated by atomic layer deposition

“…Since the ALD films are fabricated through a layer by layer deposition process and inherently exhibit high density than other techniques, the value of index gradient is relatively small. Column 4 of Table 1 shows density of ALD-TiO2 films which are slightly higher than the highest reported values by ion plating method ( [10]). Figure 4 shows the refractive index changes with temperature for TiO2 films of various thicknesses.…”

“…Importantly, the films prepared by the same technique but under different growth conditions exhibit different density and refractive index due to phase changes in their microstructure [8,9]. The density of the deposited TiO2 films is approximately directly proportional to the corresponding mechanical properties (Young's modulus) [10] and refractive index [11]. For amorphous TiO2 films the density changes at different temperatures are not caused by the material undergoing a phase change.…”

Enhanced lithiation and fracture behavior of silicon mesoscale pillars via atomic layer coatings and geometry design

“…Table 3 lists the mechanical properties of materials involved in simulations. For ALD coatings, we choose Young's modulus E ¼ 150 GPa, yield strength s y ¼ 2.7 GPa [32,33], and Poisson's ratio y ¼ 0.25 as protocol values. For (100) crystalline silicon, E ¼ 130 GPa, Shear modulus G ¼ 79.6 GPa, and y ¼ 0.28 [34,35].…”

An energy method to analyze through thickness thin film fracture during indentation

“…The elastic modulus of titanium oxide thin films was shown to vary between 65 and 147 GPa for films produced by reactive evaporation and ion plating, respectively [23]. The elastic modulus for sintered polycrystalline plates of titanium dioxide is on the order of 185 GPa and rutile varied between 120 and 480 GPa, depending on crystal orientation [24,25].…”