“…Nevertheless, high resistivity and low free carrier concentrations result in lagging changes in resistance values at high relative humidity (RH), thereby limiting the use of pristine ZnO as sensing element for humidity sensors [24][25][26]. The properties of pristine ZnO, particularly its crystal properties, catalytic behavior, and conductivity, can be enhanced through doping with metal elements, such as gallium (Ga) [27], copper (Cu) [28], sodium (Na) [29], and tin (Sn) [30]. Among these metal elements, we focused use on Sn because it can enhance conductivity through its double-ionized donors, which provide extra carriers and improve water adsorption for humidity sensing applications [31][32][33].…”