Departure from Knudsen’s cosine law during the boat evaporation of indium

Rawat, S. D.

doi:10.1116/1.568655

Journal of Vacuum Science and Technology

1975

DOI: 10.1116/1.568655

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Departure from Knudsen’s cosine law during the boat evaporation of indium

S. D. Rawat

Abstract: It is shown that Knudsen’s cosine law for free molecular flow is not obeyed in the case of vacuum evaporation of indium for film deposition from Mo boats. (AIP)

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2024

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Close-space sublimation of single-crystal metal films

Burton,

Hofmann

2024

APL Materials

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Cost-effective, versatile, and rapid deposition of single-crystal metal films is crucial to a wide spectrum of applications ranging from catalysis, plasmonics, electrochemistry, and optoelectronics to templating, epitaxial substrates, and integrated nanomanufacturing. High crystal quality typically implies low growth rates, which makes it challenging to achieve thicknesses in excess of 1 µm with conventional approaches. We show facile close-space sublimation of epitaxial single-crystal Au, Ag, and Cu films on MgO substrates. We demonstrate 10 μm thickness in less than 1 h while maintaining sub-5 nm rms surface roughness for a range of low- and high-index crystal film orientations. We show that the results can be captured by a simple model based on “line-of-sight” sublimation, which serves as a predictive tool and provides a basis to discuss broader potential as well as the limitations of this approach.

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Close-space sublimation of single-crystal metal films

Burton,

Hofmann

2024

APL Materials

View full text Add to dashboard Cite

show abstract

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Departure from Knudsen’s cosine law during the boat evaporation of indium

Abstract: It is shown that Knudsen’s cosine law for free molecular flow is not obeyed in the case of vacuum evaporation of indium for film deposition from Mo boats. (AIP)

Cited by 1 publication

References 0 publications

Close-space sublimation of single-crystal metal films

Close-space sublimation of single-crystal metal films

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