Dependence of microstructure and nanomechanical properties of amorphous carbon nitride thin films on vacuum annealing

Bai, Mingwu; Kato, Koji; Umehara, Noritsugu; Miyake, Y.; Xu, Junguo; Tokisue, Hiromitsu

doi:10.1016/s0040-6090(00)01342-0

Cited by 12 publications

(1 citation statement)

References 35 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Therefore, the hardness of the N/TiN/Ti(N,C)/DLC gradient film is about 19.84 GPa, close to the reported values of multi-layer films deposited by other techniques. [21][22][23][24] The elastic moduli of the films as a function of contact depth were calculated using the unloading curves as indicated in film was in the range of 24-59 GPa and 200-400 GPa, respectively. 22,25,26) A step in the loading curve can be observed in the loadpenetration depth curve of these coatings, which indicates cracking of the functional film.…”

Section: Mechanical Propertiesmentioning

confidence: 99%

DLC Film Fabricated by a Composite Technique of Unbalanced Magnetron Sputtering and PIII

Chen

Cai

et al. 2002

Mater. Trans.

View full text Add to dashboard Cite

DLC multilayer films were deposited on an AISI 304 stainless steel substrate by the composite technique of unbalanced magnetron sputtering and plasma immersion ion implantation (PIII). Structure characterization was performed on the films by Raman spectroscopy (RS) and Glancing X-ray Diffraction (GXRD). Composition analysis of the surface layer on the implanted substrates was carried out using auger electron spectroscopy (AES). The mechanical properties of the films were evaluated by nanoindentation. The results showed that the Raman spectra were divided into a "D" disordered peak and a "G" graphite peak with the integrated intensity ratio between them (I D /I G ) being 1.30. The implanted carbon penetrated the substrate resulting in complete interfacial mixing. The hardness, elastic modulus, fracture toughness and interfacial fracture toughness of the films were about 19.84 GPa, 190.03 GPa, 3.75 MPa·m 1/2 and 5.68 MPa·m 1/2 respectively. Compared with that of a DLC coating deposited directly by the PIII technique, the interfacial fracture toughness of the multilayer films increased, which is mainly attributed to the interfacial mixing at the interface.

show abstract