Dependences of Sputtering Times on the Structural and Electrical Properties of ZnO/Ag/ZnO Thin Films on PET by DC Sputtering

Kim, Yun-Hae; Lee, Jin Woo; Murakami, Ri-ichi

doi:10.1109/tnano.2013.2274596

Cited by 9 publications

(3 citation statements)

References 13 publications

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“…They indicated that this biosensor can efficiently measure the glucose concentration in human serum as it has high sensitivity, low sensing limit (0.01 mM) and fast response time (∼15 s). Yun-Hae Kim et al [25] prepared a transparent biosensor by sputtering of ZnO/Ag/ZnO multilayers over polyethylene terephthalate (PET). They indicated that the sheet achieved 78.3% transparency and 1.974 Ω/sq resistance.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of transparent bio-electrodes for biophysiological measurements based on modified graphene oxide

Maher¹,

Mahmoud²,

Saba³

2021

Nanotechnology

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The main objective of this work was to fabricate smart nanocomposite transparent conductive biophysiological electrodes based on modified graphene oxide (GO). The GO is abundant, flexible conductors that can be formulated as a transparent sheet and thereby alleviate the drawbacks of using indium tin oxide in transparent electrodes, like its scarcity, brittleness, and cost. GO was synthesized by a modified version of Hummers’ method under highly acidic conditions with sulfuric acid and showed good distribution at a high temperature of 90 °C. Polyvinyl alcohol (PVA) was used as a polymer host in the composite. Glycerol (Gl) was used to increase the flexibility and conductivity through an esterification reaction. Characteristic techniques were used to detect the morphology and structure of GO fillers and their polymer composites, such as transmission electron microscopy, x-ray diffraction, scanning electron microscopy and Fourier transform infrared spectroscopy. The GO/Gl/PVA transparent nanocomposite was tested for the synthesis of electrocardiogram (ECG) and electrodermal (EDA) electrodes. The Biopac device was used to evaluate the behavior of the GO/Gl/PVA plastic transparent electrode in comparison to the GO/Gl/PVA black electrode and a commercial one. The results indicated improved efficiency of the GO/Gl/PVA ECG transparent electrode. The GO/Gl/PVA EDA electrode produced signals with higher conductivity and lower noise than the commercial electrode.

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Section: Introductionmentioning

confidence: 99%

Synthesis of transparent bio-electrodes for biophysiological measurements based on modified graphene oxide

Maher¹,

Mahmoud²,

Saba³

2021

Nanotechnology

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“…Numerous D/ Ag/D multilayers with different oxides have been investigated, including SnO 2 /Ag/SnO 2 , 8 Nb 2 O 5 /Ag/ Nb 2 O 5 , 9 TiInZnO/Ag/TiInZnO, 10 MoO 3 /Ag/MoO 3 , 11 WO 3 /Ag/WO 3 , 12 Al-doped ZnO(AZO)/Ag/AZO, 13 Al 2 O 3 /Ag/Al 2 O 3 , 14 ZrON/Ag/ZrON, 15 ZnSnO/Ag/ ZnSnO, 16 and TiO 2 /Ag/TiO 2 . 17,18 In particular, ZnO/ Ag/ZnO multilayers have been extensively studied by many researchers, [19][20][21][22][23][24] because ZnO is nontoxic, 25 cheap, 26 and abundant in nature; 27 For example, Sahu et al 20 investigated the optical and electrical properties of ZnO/Ag/ZnO multilayer electrodes as functions of the ZnO and Ag thicknesses, reporting that the optimum thickness of Ag thin films was 6 nm for high optical trans-(Received November 18, 2014; accepted April 23, 2015) mittance and good electrical conductivity, e.g., sheet resistance as low as 3 X/sq and transmittance of 90% at 580 nm. Mohamed 21 investigated the effect of Ag and ZnO top layer thickness on the physical properties of ZnO/Ag/ZnO multilayer electrodes.…”

Section: Introductionmentioning

confidence: 99%

“…Based on the figure of merit (FOM), the ZnO (56.7 nm)/Ag (8.9 nm)/ZnO (39.7 nm) multilayer film was suggested to be the best candidate for TCE applications. Kim et al 23 investigated the structural and electrical properties of ZnO/Ag/ZnO films deposited on polyethylene terephthalate (PET) substrate at room temperature as a function of the Ag sputtering time. The ZnO films were grown for 20 min, while the Ag film was deposited for 10 s to 60 s. It was shown that the ZnO/Ag/ZnO multilayer films had transmittance of 78.3% (for sputtering time of 20 s) and sheet resistance of 1.97 X/sq (for 60 s).…”

Section: Introductionmentioning

confidence: 99%

Highly Transparent and Low-Resistance Indium-Free ZnO/Ag/ZnO Multilayer Electrodes for Organic Photovoltaic Devices

Kim

et al. 2015

Journal of Elec Materi

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We investigated the effect of ZnO layer thickness on the optical and electrical properties of ZnO/Ag/ZnO multilayer films deposited on glass substrates. The transmission window became wider and shifted toward the lower energy side with increasing ZnO thickness. The ZnO/Ag/ZnO (40 nm/18.8 nm/40 nm) multilayer sample showed transmittance of $96% at 550 nm. As the ZnO thickness was increased from 8 nm to 80 nm, the carrier concentration gradually decreased from 1.74 9 10 22 cm À3 to 4.33 9 10 21 cm À3 , while the charge mobility varied from 23.8 cm 2 /V-s to 24.8 cm 2 /V-s. With increasing ZnO thickness, the samples exhibited similar sheet resistances of 3.6 X/sq to 3.9 X/sq, but the resistivity increased by a factor of 4.58. The samples showed smooth surfaces with root-mean-square roughness in the range of 0.47 nm to 0.94 nm. Haacke's figure of merit (FOM) was calculated for all the samples; the ZnO (40 nm)/Ag (18.8 nm)/ZnO (40 nm) multilayer produced the highest FOM of 148.9 9 10 À3 X À1 .

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Annealing effect on electrical, nanomechanical and sensing properties of ZnO/Mo/ZnO nanofilms

et al. 2017

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Dependences of Sputtering Times on the Structural and Electrical Properties of ZnO/Ag/ZnO Thin Films on PET by DC Sputtering

Cited by 9 publications

References 13 publications

Synthesis of transparent bio-electrodes for biophysiological measurements based on modified graphene oxide

Synthesis of transparent bio-electrodes for biophysiological measurements based on modified graphene oxide

Highly Transparent and Low-Resistance Indium-Free ZnO/Ag/ZnO Multilayer Electrodes for Organic Photovoltaic Devices

Annealing effect on electrical, nanomechanical and sensing properties of ZnO/Mo/ZnO nanofilms

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