2004
DOI: 10.1016/j.surfcoat.2003.10.077
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Deposition and characterization of nanostructured metal/carbon composite films

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Cited by 105 publications
(40 citation statements)
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“…This type of microstructure is well known in the Ti-C system and has been observed and described a large number of times. [5,25,26] As predicted by our theoretical calculations, the addition of Al has a pronounced effect on the phase composition. At the studied C/Me ratios Al strongly influenced the degree of structural order.…”
Section: Resultssupporting
confidence: 80%
“…This type of microstructure is well known in the Ti-C system and has been observed and described a large number of times. [5,25,26] As predicted by our theoretical calculations, the addition of Al has a pronounced effect on the phase composition. At the studied C/Me ratios Al strongly influenced the degree of structural order.…”
Section: Resultssupporting
confidence: 80%
“…These values are similar to those observed in layered WC/DLC and TiC/DLC composites prepared using magnetron sputtering or electron cyclotron resonance chemical vapor deposition techniques (nanohardness~27 GPa). In addition, these values are significantly greater than those observed in a-C:H-copper coatings prepared using plasma-enhanced chemical vapor deposition (PECVD) or hybrid microwave plasma-assisted chemical vapor deposition/sputtering techniques (nanohardness~10 GPa) [63][64][65][66][67].…”
Section: Nanoindentationmentioning
confidence: 84%
“…These values are similar to those observed in layered tungsten carbide/DLC and titanium carbide/ DLC composite fi lms prepared using electron cyclotron resonance chemical vapor deposition and magnetron sputtering techniques (~27 GPa), and are signifi cantly greater than those observed in amorphous hydrogenated DLCcopper coatings prepared using plasmaenhanced chemical vacuum deposition and hybrid microwave plasma-assisted chemical vapor deposition/sputtering techniques (~10 GPa). [54][55][56][57][58][59] The functionally gradient DLC-silver composite fi lms demonstrated exceptional wear resistance during linear tribometer testing (CSM Instruments, Irvine California). The functionally gradient DLC-silver composite fi lms exhibited normalized wear rates of ~10 -7 to 10 -8 mm 3 /N/m.…”
Section: Diamondlike Carbon-metal Composite Thin Filmsmentioning
confidence: 99%